TY - GEN
T1 - Why is there Mode Ordering in Disk Resonator Gyros?
AU - Benvenisty, Eli
AU - Lustig, Sahar
AU - Elata, David
N1 - Publisher Copyright: © 2019 IEEE.
PY - 2019/6
Y1 - 2019/6
N2 - We provide, a rational explanation for mode ordering observed in some specific disk resonating gyros (DRG). In DRGs that are made from (100) single crystalline silicon (SCS), it is well known that the frequencies of the two orthogonal conjugate 2nd order (elliptic) wineglass modes, are distinct. This is because the material is anisotropic, and the elastic moduli in the [100] direction are different from those in the [110] direction. For DRGs that are made from (100) SCS, it is also well known that the frequencies of the two orthogonal conjugate 3rd order (rounded triangular) wineglass modes, are identical. In essence, the 3rd order wineglass mode is insensitive to material anisotropy. In most structures, it is often the case that higher order modes occur at a higher frequency. However, in a recent study of DRGs that are made from (100) SCS and are constructed from spoke-connected rings, it was surprisingly discovered that the frequency of the 3rd order wineglass mode is lower than the frequency of the 2nd order wineglass mode. In this work we analyze the problem and provide new insight, and for the first time provide a rational explanation of this phenomenon.
AB - We provide, a rational explanation for mode ordering observed in some specific disk resonating gyros (DRG). In DRGs that are made from (100) single crystalline silicon (SCS), it is well known that the frequencies of the two orthogonal conjugate 2nd order (elliptic) wineglass modes, are distinct. This is because the material is anisotropic, and the elastic moduli in the [100] direction are different from those in the [110] direction. For DRGs that are made from (100) SCS, it is also well known that the frequencies of the two orthogonal conjugate 3rd order (rounded triangular) wineglass modes, are identical. In essence, the 3rd order wineglass mode is insensitive to material anisotropy. In most structures, it is often the case that higher order modes occur at a higher frequency. However, in a recent study of DRGs that are made from (100) SCS and are constructed from spoke-connected rings, it was surprisingly discovered that the frequency of the 3rd order wineglass mode is lower than the frequency of the 2nd order wineglass mode. In this work we analyze the problem and provide new insight, and for the first time provide a rational explanation of this phenomenon.
KW - Disk resonator gyroscope (DRG)
KW - mode ordering
KW - wineglass modes
UR - http://www.scopus.com/inward/record.url?scp=85071930546&partnerID=8YFLogxK
U2 - 10.1109/TRANSDUCERS.2019.8808443
DO - 10.1109/TRANSDUCERS.2019.8808443
M3 - منشور من مؤتمر
T3 - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
SP - 2178
EP - 2181
BT - 2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
T2 - 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Y2 - 23 June 2019 through 27 June 2019
ER -