Why is there Mode Ordering in Disk Resonator Gyros?

Eli Benvenisty, Sahar Lustig, David Elata

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We provide, a rational explanation for mode ordering observed in some specific disk resonating gyros (DRG). In DRGs that are made from (100) single crystalline silicon (SCS), it is well known that the frequencies of the two orthogonal conjugate 2nd order (elliptic) wineglass modes, are distinct. This is because the material is anisotropic, and the elastic moduli in the [100] direction are different from those in the [110] direction. For DRGs that are made from (100) SCS, it is also well known that the frequencies of the two orthogonal conjugate 3rd order (rounded triangular) wineglass modes, are identical. In essence, the 3rd order wineglass mode is insensitive to material anisotropy. In most structures, it is often the case that higher order modes occur at a higher frequency. However, in a recent study of DRGs that are made from (100) SCS and are constructed from spoke-connected rings, it was surprisingly discovered that the frequency of the 3rd order wineglass mode is lower than the frequency of the 2nd order wineglass mode. In this work we analyze the problem and provide new insight, and for the first time provide a rational explanation of this phenomenon.

Original languageEnglish
Title of host publication2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Pages2178-2181
Number of pages4
ISBN (Electronic)9781728120072
DOIs
StatePublished - Jun 2019
Event20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII - Berlin, Germany
Duration: 23 Jun 201927 Jun 2019

Publication series

Name2019 20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII

Conference

Conference20th International Conference on Solid-State Sensors, Actuators and Microsystems and Eurosensors XXXIII, TRANSDUCERS 2019 and EUROSENSORS XXXIII
Country/TerritoryGermany
CityBerlin
Period23/06/1927/06/19

Keywords

  • Disk resonator gyroscope (DRG)
  • mode ordering
  • wineglass modes

All Science Journal Classification (ASJC) codes

  • Process Chemistry and Technology
  • Spectroscopy
  • Electrical and Electronic Engineering
  • Mechanical Engineering
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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