Ultrastrong Parametric Coupling between a Superconducting Cavity and a Mechanical Resonator

We present a new optomechanical device where the motion of a micromechanical membrane couples to a microwave resonance of a three-dimensional superconducting cavity. With this architecture, we realize ultrastrong parametric coupling, where the coupling not only exceeds the dissipation in the system but also rivals the mechanical frequency itself. In this regime, the optomechanical interaction induces a frequency splitting between the hybridized normal modes that reaches 88% of the bare mechanical frequency, limited by the fundamental parametric instability. The coupling also exceeds the mechanical thermal decoherence rate, enabling new applications in ultrafast quantum state transfer and entanglement generation.