@inproceedings{ad3956eae2b940b2b23cb70851fef79b,
title = "Ultra-high Q silicon resonators in planarized LOCOS",
abstract = "We describe a modified local oxidation of silicon process as a platform for the fabrication of waveguides and ultra-high Quality factor (5.3) silicon resonators, with nearly fully planar interface for multilayer silicon integration.",
author = "Alex Naiman and Boris Desiatov and Liron Stern and Noa Mazurski and Joseph Shappir and Uriel Levy",
note = "Publisher Copyright: {\textcopyright} 2015 IEEE.; International Conference on Optical MEMS and Nanophotonics, OMN 2015 ; Conference date: 02-08-2015 Through 05-08-2015",
year = "2015",
month = oct,
day = "2",
doi = "10.1109/omn.2015.7288843",
language = "الإنجليزيّة",
series = "International Conference on Optical MEMS and Nanophotonics",
publisher = "IEEE Computer Society",
booktitle = "OMN 2015 Jerusalem - 2015 International Conference on Optical MEMS and Nanophotonics, Proceedings",
address = "الولايات المتّحدة",
}