@inproceedings{66476e501f7d4209bb0d166503743cc4,
title = "Ultra-high Q silicon resonators in planarized LOCOS",
abstract = "We describe a modified local oxidation of silicon process as a platform for the fabrication of waveguides and ultra-high Quality factor (5.3·10) silicon resonators, with nearly fully planar interface for multilayer silicon integration.",
keywords = "Fabrication, Optical resonators, Optical waveguides, Photonics, Q-factor, Silicon, Silicon nitride",
author = "Alex Naiman and Boris Desiatov and Liron Stern and Noa Mazurski and Joseph Shappir and Uriel Levy",
note = "Publisher Copyright: {\textcopyright} 2015 OSA.; Conference on Lasers and Electro-Optics, CLEO 2015 ; Conference date: 10-05-2015 Through 15-05-2015",
year = "2015",
month = aug,
day = "10",
language = "الإنجليزيّة",
series = "Conference on Lasers and Electro-Optics Europe - Technical Digest",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2015 Conference on Lasers and Electro-Optics, CLEO 2015",
address = "الولايات المتّحدة",
}