@inproceedings{3b356d444cd046a5911da07b596a5dbc,
title = "Ultra-high Q silicon resonators in planarized LOCOS",
abstract = "We describe a modified local oxidation of silicon process as a platform for the fabrication of waveguides and ultra-high Quality factor (6 5.3 106) silicon resonators, with nearly fully planar interface for multilayer silicon integration.",
author = "Alex Naiman and Boris Desiatov and Liron Stern and Noa Mazurski and Joseph Shappir and Uriel Levy",
year = "2015",
month = may,
day = "4",
doi = "https://doi.org/10.1364/cleo_si.2015.sth3g.3",
language = "الإنجليزيّة",
series = "CLEO: Science and Innovations, CLEO-SI 2015",
pages = "2267",
booktitle = "CLEO",
note = "CLEO: Science and Innovations, CLEO-SI 2015 ; Conference date: 10-05-2015 Through 15-05-2015",
}