Two axes actuators (x-z or x-θ) driven by in-line electrostatic comb-drives

We present a two axis actuator which can be controlled both in-plane, and out-of-plane. Previously we demonstrated a conversion mechanism in which in-plane motion was translated to out-of-plane motion. That mechanism harnesses comb-drive actuation and converts the in-plane motion of the comb-drive shuttle to a parallel out-of-plane motion of a rigid stage. In the present work we show a two axis control of the actuator, one axis inplane and one out-of-plane. We also show a new test device that converts in-plane motion to a tilting motion, in which both axes may be separately controlled. Presented experimental data is in good agreement with model predictions. Specifically, we demonstrate a linear relation between in-plane electrostatic force, and the tilt angle.