Tunneling emitter bipolar transistor as a characterization tool for dielectrics and their interfaces

E. Yalon, A. Gavrilov, S. Cohen, D. Mistele, V. Mikhelashvili, B. Meyler, J. Salzman, D. Ritter

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

The metal insulator semiconductor and metal insulator metal structures are of interest for transistor technology and resistive switching based memory. We propose the tunneling emitter bipolar transistor as a complementary characterization tool of both structures. Using this technique one can distinguish between electron and hole injection through the insulator and detect the presence of recombination centers at the dielectric-semiconductor interface. In addition, the base-collector p-n junction adjacent to the dielectric is a sensitive detector for material damage. We have examined two dielectric materials: Al2O3 and Si3N 4 using a tunneling emitter bipolar transistor based upon the InP/GaInAs material system. The main conclusion drawn from the experiments is that the dominant transport mechanism through the insulators is filamentary defect assisted transport. Thermal treatment of both materials significantly reduced the interface recombination velocity.

Original languageEnglish
Title of host publicationPhysics and Technology of High-k Materials 9
Pages325-334
Number of pages10
Edition3
ISBN (Electronic)9781607682578
DOIs
StatePublished - 2011
Event9th International Symposium on High Dielectric Constant and Other Dielectric Materials for Nanoelectronics and Photonics - 220th ECS Meeting - Boston, MA, United States
Duration: 10 Oct 201112 Oct 2011

Publication series

NameECS Transactions
Number3
Volume41

Conference

Conference9th International Symposium on High Dielectric Constant and Other Dielectric Materials for Nanoelectronics and Photonics - 220th ECS Meeting
Country/TerritoryUnited States
CityBoston, MA
Period10/10/1112/10/11

All Science Journal Classification (ASJC) codes

  • General Engineering

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