Tuning the first instability window of a MEMS Meissner parametric resonator using a linear electrostatic anti-spring

Shai Shmulevich; Inbar Hotzen; David Elata

doi:10.1109/MEMSYS.2015.7050914

Tuning the first instability window of a MEMS Meissner parametric resonator using a linear electrostatic anti-spring

Shai Shmulevich, Inbar Hotzen, David Elata

Technion - Israel Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

We demonstrate frequency tuning of the first instability window of a MEMS Meissner parametric resonator. Our parametric resonator includes a transducer which provides a negative electrostatic stiffness that is not affected by motion. We therefore refer to this transducer as a linear anti-spring. We achieve parametric excitation by time-modulation of this negative electrostatic stiffness. Our design is rather robust to fabrication tolerances. In contrast, most state-of-the-art MEMS parametric resonators are either detrimentally affected by a nonlinear electrostatic stiffness, or are far more sensitive to fabrication tolerances.

Original language	English
Article number	7050914
Pages (from-to)	172-175
Number of pages	4
Journal	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2015-February
Issue number	February
DOIs	https://doi.org/10.1109/MEMSYS.2015.7050914
State	Published - 26 Feb 2015
Event	2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 18 Jan 2015 → 22 Jan 2015

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/MEMSYS.2015.7050914

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title = "Tuning the first instability window of a MEMS Meissner parametric resonator using a linear electrostatic anti-spring",

abstract = "We demonstrate frequency tuning of the first instability window of a MEMS Meissner parametric resonator. Our parametric resonator includes a transducer which provides a negative electrostatic stiffness that is not affected by motion. We therefore refer to this transducer as a linear anti-spring. We achieve parametric excitation by time-modulation of this negative electrostatic stiffness. Our design is rather robust to fabrication tolerances. In contrast, most state-of-the-art MEMS parametric resonators are either detrimentally affected by a nonlinear electrostatic stiffness, or are far more sensitive to fabrication tolerances.",

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Tuning the first instability window of a MEMS Meissner parametric resonator using a linear electrostatic anti-spring. / Shmulevich, Shai; Hotzen, Inbar; Elata, David.
In: Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), Vol. 2015-February, No. February, 7050914, 26.02.2015, p. 172-175.

Research output: Contribution to journal › Conference article › peer-review

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AU - Shmulevich, Shai

AU - Hotzen, Inbar

AU - Elata, David

PY - 2015/2/26

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N2 - We demonstrate frequency tuning of the first instability window of a MEMS Meissner parametric resonator. Our parametric resonator includes a transducer which provides a negative electrostatic stiffness that is not affected by motion. We therefore refer to this transducer as a linear anti-spring. We achieve parametric excitation by time-modulation of this negative electrostatic stiffness. Our design is rather robust to fabrication tolerances. In contrast, most state-of-the-art MEMS parametric resonators are either detrimentally affected by a nonlinear electrostatic stiffness, or are far more sensitive to fabrication tolerances.

AB - We demonstrate frequency tuning of the first instability window of a MEMS Meissner parametric resonator. Our parametric resonator includes a transducer which provides a negative electrostatic stiffness that is not affected by motion. We therefore refer to this transducer as a linear anti-spring. We achieve parametric excitation by time-modulation of this negative electrostatic stiffness. Our design is rather robust to fabrication tolerances. In contrast, most state-of-the-art MEMS parametric resonators are either detrimentally affected by a nonlinear electrostatic stiffness, or are far more sensitive to fabrication tolerances.

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DO - 10.1109/MEMSYS.2015.7050914

M3 - مقالة من مؤنمر

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VL - 2015-February

SP - 172

EP - 175

JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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T2 - 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015

Y2 - 18 January 2015 through 22 January 2015

ER -

Tuning the first instability window of a MEMS Meissner parametric resonator using a linear electrostatic anti-spring

Abstract

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