TILTING ACTUATOR WITH CLOSE-GAP ELECTRODES

Viacheslav Krylov (Inventor), Tsvi Shmilovich (Inventor)

Research output: Patent

Abstract

A tunable tilting device is described. The device includes a tilting element and a suspension structure that has one or more flexures coupled to the tilting element. The suspension structure has a variable bending stiffness and configured to bend due to a tilting motion of the tilting element around a pivot axis. The suspension structure is responsive to a tuning force actuating a variation of an extension stress or a compression stress of the suspension structure, and thereby can vary the bending stiffness of the suspension structure.

Original languageAmerican English
Patent numberUS2013141768
IPCH02N 1/ 00 A I
Priority date30/01/13
StatePublished - 6 Jun 2013

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