Three dimensional assembly in directed self-assembly of block copolymers

Tamar Segal-Peretz; Chun Zhou; Jiaxing Ren; Takahiro Dazai; Leonidas E. Ocola; Ralu N.S. Divan; Paul F. Nealey

doi:10.2494/photopolymer.29.653

Three dimensional assembly in directed self-assembly of block copolymers

Tamar Segal-Peretz, Chun Zhou, Jiaxing Ren, Takahiro Dazai, Leonidas E. Ocola, Ralu N.S. Divan, Paul F. Nealey

Research output: Contribution to journal › Article › peer-review

Abstract

The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Future work will include control over 3D assembly in sub-10 nm processes.

Original language	English
Pages (from-to)	653-657
Number of pages	5
Journal	Journal of Photopolymer Science and Technology
Volume	29
Issue number	5
DOIs	https://doi.org/10.2494/photopolymer.29.653
State	Published - 2016
Externally published	Yes

Keywords

Block copolymer
Contact hole
Directed self-assembly
Lithography
Metrology
Transmission electron microscopy

All Science Journal Classification (ASJC) codes

Polymers and Plastics
Organic Chemistry
Materials Chemistry

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10.2494/photopolymer.29.653

Cite this

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title = "Three dimensional assembly in directed self-assembly of block copolymers",

abstract = "The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Future work will include control over 3D assembly in sub-10 nm processes.",

keywords = "Block copolymer, Contact hole, Directed self-assembly, Lithography, Metrology, Transmission electron microscopy",

author = "Tamar Segal-Peretz and Chun Zhou and Jiaxing Ren and Takahiro Dazai and Ocola, {Leonidas E.} and Divan, {Ralu N.S.} and Nealey, {Paul F.}",

note = "Publisher Copyright: {\textcopyright} 2016SPST.",

year = "2016",

doi = "10.2494/photopolymer.29.653",

language = "الإنجليزيّة",

volume = "29",

pages = "653--657",

journal = "Journal of Photopolymer Science and Technology",

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TY - JOUR

T1 - Three dimensional assembly in directed self-assembly of block copolymers

AU - Segal-Peretz, Tamar

AU - Zhou, Chun

AU - Ren, Jiaxing

AU - Dazai, Takahiro

AU - Ocola, Leonidas E.

AU - Divan, Ralu N.S.

AU - Nealey, Paul F.

PY - 2016

Y1 - 2016

N2 - The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Future work will include control over 3D assembly in sub-10 nm processes.

AB - The three-dimensional assembly of poly (styrene-b-methyl methacrylate) (PS-b-PMMA) in chemoepitaxy and graphoepitaxy directed self-assembly (DSA) was investigated using scanning transmission electron microscopy (STEM) tomography. The tomographic characterization revealed hidden morphologies and defects at the BCP- chemical pattern interface in lamellar DSA, and probed the formation of cylinders at the bottom of cylindrical DSA for contact hole shrink. Future work will include control over 3D assembly in sub-10 nm processes.

KW - Block copolymer

KW - Contact hole

KW - Directed self-assembly

KW - Lithography

KW - Metrology

KW - Transmission electron microscopy

UR - http://www.scopus.com/inward/record.url?scp=84984941791&partnerID=8YFLogxK

U2 - 10.2494/photopolymer.29.653

DO - 10.2494/photopolymer.29.653

M3 - مقالة

SN - 0914-9244

VL - 29

SP - 653

EP - 657

JO - Journal of Photopolymer Science and Technology

JF - Journal of Photopolymer Science and Technology

IS - 5

ER -

Three dimensional assembly in directed self-assembly of block copolymers

Abstract

Keywords

All Science Journal Classification (ASJC) codes

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