Abstract
We present a self-excited MEMS Franklin oscillator, which responds in steady state vibrations when subjected to a sufficient dc voltage. The system is constructed from an electrostatically-floating rotor, which sequentially transfers charge between a source and drain electrodes. We present a comprehensive analysis of the electromechanical response of the system. Our analysis shows that current flows from the source to drain only when the rotor is in transition. Surprisingly, at contact of the rotor with either the source or the drain electrodes, there is no current in the system, and the charge transfer mechanism is essentially a recombination of opposite charges. This means that although we drive our system by 30 to 70 Volts, the contacts are essentially cold switching. Our experimental measurements of the dynamic response of the system are in good agreement with our model predictions.
| Original language | English |
|---|---|
| Article number | 7050881 |
| Pages (from-to) | 41-44 |
| Number of pages | 4 |
| Journal | Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS) |
| Volume | 2015-February |
| Issue number | February |
| DOIs | |
| State | Published - 26 Feb 2015 |
| Event | 2015 28th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2015 - Estoril, Portugal Duration: 18 Jan 2015 → 22 Jan 2015 |
All Science Journal Classification (ASJC) codes
- Electronic, Optical and Magnetic Materials
- Condensed Matter Physics
- Mechanical Engineering
- Electrical and Electronic Engineering