Tailoring the nonlinear response of MEMS resonators using shape optimization

Lily L. Li; Pavel M. Polunin; Suguang Dou; Oriel Shoshani; B. Scott Strachan; Jakob S. Jensen; Steven W. Shaw; Kimberly L. Turner

doi:https://doi.org/10.1063/1.4976749

Tailoring the nonlinear response of MEMS resonators using shape optimization

Lily L. Li, Pavel M. Polunin, Suguang Dou, Oriel Shoshani, B. Scott Strachan, Jakob S. Jensen, Steven W. Shaw, Kimberly L. Turner

Department of Mechanical Engineering

Ben-Gurion University of the Negev

Research output: Contribution to journal › Article › peer-review

Abstract

We demonstrate systematic control of mechanical nonlinearities in micro-electromechanical (MEMS) resonators using shape optimization methods. This approach generates beams with non-uniform profiles, which have nonlinearities and frequencies that differ from uniform beams. A set of bridge-type microbeams with selected variable profiles that directly affect the nonlinear characteristics of in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The manipulation of this nonlinearity has significant interest in many applications, including precise mass sensing, accurate measurement of angular rates, and timekeeping.

Original language	English
Article number	081902
Journal	Applied Physics Letters
Volume	110
Issue number	8
DOIs	https://doi.org/10.1063/1.4976749
State	Published - 20 Feb 2017

All Science Journal Classification (ASJC) codes

Physics and Astronomy (miscellaneous)

Access to Document

https://doi.org/10.1063/1.4976749

Cite this

@article{a7cf35857cd34e239f29aa230b576310,

title = "Tailoring the nonlinear response of MEMS resonators using shape optimization",

abstract = "We demonstrate systematic control of mechanical nonlinearities in micro-electromechanical (MEMS) resonators using shape optimization methods. This approach generates beams with non-uniform profiles, which have nonlinearities and frequencies that differ from uniform beams. A set of bridge-type microbeams with selected variable profiles that directly affect the nonlinear characteristics of in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The manipulation of this nonlinearity has significant interest in many applications, including precise mass sensing, accurate measurement of angular rates, and timekeeping.",

author = "Li, {Lily L.} and Polunin, {Pavel M.} and Suguang Dou and Oriel Shoshani and {Scott Strachan}, B. and Jensen, {Jakob S.} and Shaw, {Steven W.} and Turner, {Kimberly L.}",

note = "Funding Information: This work was supported by NSF Grant Nos. 1561829, 1561934, 1234067, 1234645, 442550-22324, and 442550-22031, ERC Starting Grant No. 279529 (INNODYN). Publisher Copyright: {\textcopyright} 2017 Author(s).",

year = "2017",

month = feb,

day = "20",

doi = "https://doi.org/10.1063/1.4976749",

language = "English",

volume = "110",

journal = "Applied Physics Letters",

issn = "0003-6951",

publisher = "American Institute of Physics",

number = "8",

}

TY - JOUR

T1 - Tailoring the nonlinear response of MEMS resonators using shape optimization

AU - Li, Lily L.

AU - Polunin, Pavel M.

AU - Dou, Suguang

AU - Shoshani, Oriel

AU - Scott Strachan, B.

AU - Jensen, Jakob S.

AU - Shaw, Steven W.

AU - Turner, Kimberly L.

N1 - Funding Information: This work was supported by NSF Grant Nos. 1561829, 1561934, 1234067, 1234645, 442550-22324, and 442550-22031, ERC Starting Grant No. 279529 (INNODYN). Publisher Copyright: © 2017 Author(s).

PY - 2017/2/20

Y1 - 2017/2/20

N2 - We demonstrate systematic control of mechanical nonlinearities in micro-electromechanical (MEMS) resonators using shape optimization methods. This approach generates beams with non-uniform profiles, which have nonlinearities and frequencies that differ from uniform beams. A set of bridge-type microbeams with selected variable profiles that directly affect the nonlinear characteristics of in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The manipulation of this nonlinearity has significant interest in many applications, including precise mass sensing, accurate measurement of angular rates, and timekeeping.

AB - We demonstrate systematic control of mechanical nonlinearities in micro-electromechanical (MEMS) resonators using shape optimization methods. This approach generates beams with non-uniform profiles, which have nonlinearities and frequencies that differ from uniform beams. A set of bridge-type microbeams with selected variable profiles that directly affect the nonlinear characteristics of in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The manipulation of this nonlinearity has significant interest in many applications, including precise mass sensing, accurate measurement of angular rates, and timekeeping.

UR - http://www.scopus.com/inward/record.url?scp=85013414377&partnerID=8YFLogxK

U2 - https://doi.org/10.1063/1.4976749

DO - https://doi.org/10.1063/1.4976749

M3 - Article

SN - 0003-6951

VL - 110

JO - Applied Physics Letters

JF - Applied Physics Letters

IS - 8

M1 - 081902

ER -

Tailoring the nonlinear response of MEMS resonators using shape optimization

Abstract

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this