Systematic design of MEMS resonators for optimal nonlinear dynamic response

Lily L. Li; Pavel M. Polunin; Suguang Dou; Oriel Shoshani; B. Scott Strachan; Jakob S. Jensen; Steven W. Shaw; Kimberly L. Turner

doi:10.31438/trf.hh2016.118

Systematic design of MEMS resonators for optimal nonlinear dynamic response

Lily L. Li, Pavel M. Polunin, Suguang Dou, Oriel Shoshani, B. Scott Strachan, Jakob S. Jensen, Steven W. Shaw, Kimberly L. Turner

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We report on the first experimental demonstration of an effective and systematic control over the mechanical contribution to the Duffing nonlinearity in micro-electromechanical (MEMS) resonators using nonlinear shape optimization methods. A set of microbeams with selected variable geometry profiles optimized for in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The minimization of the cubic term in the resonator stiffness resulted in a substantial increase of the resonator linear range.

Original language	American English
Title of host publication	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
Editors	Mark G. Allen, Tina Lamers
Pages	444-447
Number of pages	4
ISBN (Electronic)	9781940470023
DOIs	https://doi.org/10.31438/trf.hh2016.118
State	Published - 1 Jan 2016
Externally published	Yes
Event	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 - Hilton Head, United States Duration: 5 Jun 2016 → 9 Jun 2016

Publication series

Name	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Conference

Conference	2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016
Country/Territory	United States
City	Hilton Head
Period	5/06/16 → 9/06/16

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.31438/trf.hh2016.118

Cite this

Li, L. L., Polunin, P. M., Dou, S., Shoshani, O., Strachan, B. S., Jensen, J. S., Shaw, S. W., & Turner, K. L. (2016). Systematic design of MEMS resonators for optimal nonlinear dynamic response. In M. G. Allen, & T. Lamers (Eds.), 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 (pp. 444-447). (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016). https://doi.org/10.31438/trf.hh2016.118

@inproceedings{83c79ad167414a02857ba9e24cc57b17,

title = "Systematic design of MEMS resonators for optimal nonlinear dynamic response",

abstract = "We report on the first experimental demonstration of an effective and systematic control over the mechanical contribution to the Duffing nonlinearity in micro-electromechanical (MEMS) resonators using nonlinear shape optimization methods. A set of microbeams with selected variable geometry profiles optimized for in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The minimization of the cubic term in the resonator stiffness resulted in a substantial increase of the resonator linear range.",

author = "Li, \{Lily L.\} and Polunin, \{Pavel M.\} and Suguang Dou and Oriel Shoshani and Strachan, \{B. Scott\} and Jensen, \{Jakob S.\} and Shaw, \{Steven W.\} and Turner, \{Kimberly L.\}",

note = "Publisher Copyright: {\textcopyright} 2016 TRF; 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016 ; Conference date: 05-06-2016 Through 09-06-2016",

year = "2016",

month = jan,

day = "1",

doi = "10.31438/trf.hh2016.118",

language = "American English",

series = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",

pages = "444--447",

editor = "Allen, \{Mark G.\} and Tina Lamers",

booktitle = "2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016",

}

Li, LL, Polunin, PM, Dou, S, Shoshani, O, Strachan, BS, Jensen, JS, Shaw, SW & Turner, KL 2016, Systematic design of MEMS resonators for optimal nonlinear dynamic response. in MG Allen & T Lamers (eds), 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016. 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016, pp. 444-447, 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016, Hilton Head, United States, 5/06/16. https://doi.org/10.31438/trf.hh2016.118

Systematic design of MEMS resonators for optimal nonlinear dynamic response. / Li, Lily L.; Polunin, Pavel M.; Dou, Suguang et al.
2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016. ed. / Mark G. Allen; Tina Lamers. 2016. p. 444-447 (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Systematic design of MEMS resonators for optimal nonlinear dynamic response

AU - Li, Lily L.

AU - Polunin, Pavel M.

AU - Dou, Suguang

AU - Shoshani, Oriel

AU - Strachan, B. Scott

AU - Jensen, Jakob S.

AU - Shaw, Steven W.

AU - Turner, Kimberly L.

PY - 2016/1/1

Y1 - 2016/1/1

N2 - We report on the first experimental demonstration of an effective and systematic control over the mechanical contribution to the Duffing nonlinearity in micro-electromechanical (MEMS) resonators using nonlinear shape optimization methods. A set of microbeams with selected variable geometry profiles optimized for in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The minimization of the cubic term in the resonator stiffness resulted in a substantial increase of the resonator linear range.

AB - We report on the first experimental demonstration of an effective and systematic control over the mechanical contribution to the Duffing nonlinearity in micro-electromechanical (MEMS) resonators using nonlinear shape optimization methods. A set of microbeams with selected variable geometry profiles optimized for in-plane vibrations was designed and characterized. Experimental results have demonstrated that these shape changes result in more than a three-fold increase and a two-fold reduction in the Duffing nonlinearity due to resonator mid-line stretching. The minimization of the cubic term in the resonator stiffness resulted in a substantial increase of the resonator linear range.

UR - http://www.scopus.com/inward/record.url?scp=85071507243&partnerID=8YFLogxK

U2 - 10.31438/trf.hh2016.118

DO - 10.31438/trf.hh2016.118

M3 - Conference contribution

T3 - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

SP - 444

EP - 447

BT - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

A2 - Allen, Mark G.

A2 - Lamers, Tina

T2 - 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016

Y2 - 5 June 2016 through 9 June 2016

ER -

Li LL, Polunin PM, Dou S, Shoshani O, Strachan BS, Jensen JS et al. Systematic design of MEMS resonators for optimal nonlinear dynamic response. In Allen MG, Lamers T, editors, 2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016. 2016. p. 444-447. (2016 Solid-State Sensors, Actuators and Microsystems Workshop, Hilton Head 2016). doi: 10.31438/trf.hh2016.118

Systematic design of MEMS resonators for optimal nonlinear dynamic response

Abstract

Publication series

Conference

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this