SUBTRACTIVE MICROFABRICATION AND FUNCTIONALIZATION OF SUBSTRATES BY HYDRODYNAMIC FLOW CONFINEMENTS

Govind Kaigala; Federico Paratore; Moran Bercovici; Daniel Widerker; Robert Dean Lovchik

SUBTRACTIVE MICROFABRICATION AND FUNCTIONALIZATION OF SUBSTRATES BY HYDRODYNAMIC FLOW CONFINEMENTS

Govind Kaigala (Inventor), Federico Paratore (Inventor), Moran Bercovici (Inventor), Daniel Widerker (Inventor), Robert Dean Lovchik (Inventor)

Mechanical Engineering

Technion - Israel Institute of Technology

Research output: Patent

Abstract

Patterning a substrate can be provided. A substrate is covered by an immersion liquid and a microfluidic probe head is positioned in proximity with the surface of the substrate, so as to immerse a processing surface of the probe head in the immersion liquid. Liquid flows are generated between the processing surface of the probe head and the surface of the substrate, via the probe head. The liquid flows generated include an etching flow of an etching liquid (e.g., an acid or solvent) and a processing flow of a processing liquid (e.g., a solution or suspension).

Original language	American English
Patent number	US2021220825
IPC	B01L 3/ 00 A I
Priority date	14/01/21
State	Published - 22 Jul 2021

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Cite this

@misc{acf9f6d55a584813bff8b1fdcffd3f95,

title = "SUBTRACTIVE MICROFABRICATION AND FUNCTIONALIZATION OF SUBSTRATES BY HYDRODYNAMIC FLOW CONFINEMENTS",

abstract = "Patterning a substrate can be provided. A substrate is covered by an immersion liquid and a microfluidic probe head is positioned in proximity with the surface of the substrate, so as to immerse a processing surface of the probe head in the immersion liquid. Liquid flows are generated between the processing surface of the probe head and the surface of the substrate, via the probe head. The liquid flows generated include an etching flow of an etching liquid (e.g., an acid or solvent) and a processing flow of a processing liquid (e.g., a solution or suspension).",

author = "Govind Kaigala and Federico Paratore and Moran Bercovici and Daniel Widerker and Lovchik, {Robert Dean}",

year = "2021",

month = jul,

day = "22",

language = "American English",

type = "Patent",

note = "US2021220825; B01L 3/ 00 A I",

}

TY - PAT

T1 - SUBTRACTIVE MICROFABRICATION AND FUNCTIONALIZATION OF SUBSTRATES BY HYDRODYNAMIC FLOW CONFINEMENTS

AU - Kaigala, Govind

AU - Paratore, Federico

AU - Bercovici, Moran

AU - Widerker, Daniel

AU - Lovchik, Robert Dean

PY - 2021/7/22

Y1 - 2021/7/22

N2 - Patterning a substrate can be provided. A substrate is covered by an immersion liquid and a microfluidic probe head is positioned in proximity with the surface of the substrate, so as to immerse a processing surface of the probe head in the immersion liquid. Liquid flows are generated between the processing surface of the probe head and the surface of the substrate, via the probe head. The liquid flows generated include an etching flow of an etching liquid (e.g., an acid or solvent) and a processing flow of a processing liquid (e.g., a solution or suspension).

AB - Patterning a substrate can be provided. A substrate is covered by an immersion liquid and a microfluidic probe head is positioned in proximity with the surface of the substrate, so as to immerse a processing surface of the probe head in the immersion liquid. Liquid flows are generated between the processing surface of the probe head and the surface of the substrate, via the probe head. The liquid flows generated include an etching flow of an etching liquid (e.g., an acid or solvent) and a processing flow of a processing liquid (e.g., a solution or suspension).

M3 - Patent

M1 - US2021220825

ER -