Sub-15 nm nanowires enabled by cryo pulsed self-aligned nanotrench ablation on carbon nanotubes

Sanchit Deshmukh; Feifei Lian; Eilam Yalon; Gregory Pitner; H. S.Philip Wong; Eric Pop

doi:10.1109/NANO.2017.8117470

Sub-15 nm nanowires enabled by cryo pulsed self-aligned nanotrench ablation on carbon nanotubes

Sanchit Deshmukh, Feifei Lian, Eilam Yalon, Gregory Pitner, H. S.Philip Wong, Eric Pop

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

Nanopatterning of features at current technology nodes requires expensive deep UV lithography or low throughput electron beam lithography. Here we demonstrate a modification of carbon nanotube (CNT) enabled self-aligned nanotrench ablation (SANTA) to achieve sub-15 nm dimensions for metal patterning. The technique utilizes nanoscale thermal transport within a typical polymer, in this case, poly-methyl methacrylate (PMMA) at cryogenic ambient temperatures (-120°C) for definition of highly scaled features. The technique shows promise for nanofabrication below sub-10 nm dimensions.

Original language	English
Title of host publication	2017 IEEE 17th International Conference on Nanotechnology, NANO 2017
Pages	489-490
Number of pages	2
ISBN (Electronic)	9781509030286
DOIs	https://doi.org/10.1109/NANO.2017.8117470
State	Published - 21 Nov 2017
Externally published	Yes
Event	17th IEEE International Conference on Nanotechnology, NANO 2017 - Pittsburgh, United States Duration: 25 Jul 2017 → 28 Jul 2017

Publication series

Name	2017 IEEE 17th International Conference on Nanotechnology, NANO 2017

Conference

Conference	17th IEEE International Conference on Nanotechnology, NANO 2017
Country/Territory	United States
City	Pittsburgh
Period	25/07/17 → 28/07/17

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

carbon nanotubes
finite element
nanolithography
nanoscale thermal transport
nanowire
self-aligned fabrication

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Surfaces, Coatings and Films
Electrical and Electronic Engineering

Access to Document

10.1109/NANO.2017.8117470

Cite this

Deshmukh, S., Lian, F., Yalon, E., Pitner, G., Wong, H. S. P., & Pop, E. (2017). Sub-15 nm nanowires enabled by cryo pulsed self-aligned nanotrench ablation on carbon nanotubes. In 2017 IEEE 17th International Conference on Nanotechnology, NANO 2017 (pp. 489-490). Article 8117470 (2017 IEEE 17th International Conference on Nanotechnology, NANO 2017). https://doi.org/10.1109/NANO.2017.8117470

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abstract = "Nanopatterning of features at current technology nodes requires expensive deep UV lithography or low throughput electron beam lithography. Here we demonstrate a modification of carbon nanotube (CNT) enabled self-aligned nanotrench ablation (SANTA) to achieve sub-15 nm dimensions for metal patterning. The technique utilizes nanoscale thermal transport within a typical polymer, in this case, poly-methyl methacrylate (PMMA) at cryogenic ambient temperatures (-120°C) for definition of highly scaled features. The technique shows promise for nanofabrication below sub-10 nm dimensions.",

keywords = "carbon nanotubes, finite element, nanolithography, nanoscale thermal transport, nanowire, self-aligned fabrication",

author = "Sanchit Deshmukh and Feifei Lian and Eilam Yalon and Gregory Pitner and Wong, {H. S.Philip} and Eric Pop",

note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 17th IEEE International Conference on Nanotechnology, NANO 2017 ; Conference date: 25-07-2017 Through 28-07-2017",

year = "2017",

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doi = "10.1109/NANO.2017.8117470",

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Deshmukh, S, Lian, F, Yalon, E, Pitner, G, Wong, HSP & Pop, E 2017, Sub-15 nm nanowires enabled by cryo pulsed self-aligned nanotrench ablation on carbon nanotubes. in 2017 IEEE 17th International Conference on Nanotechnology, NANO 2017., 8117470, 2017 IEEE 17th International Conference on Nanotechnology, NANO 2017, pp. 489-490, 17th IEEE International Conference on Nanotechnology, NANO 2017, Pittsburgh, United States, 25/07/17. https://doi.org/10.1109/NANO.2017.8117470

Sub-15 nm nanowires enabled by cryo pulsed self-aligned nanotrench ablation on carbon nanotubes. / Deshmukh, Sanchit; Lian, Feifei; Yalon, Eilam et al.
2017 IEEE 17th International Conference on Nanotechnology, NANO 2017. 2017. p. 489-490 8117470 (2017 IEEE 17th International Conference on Nanotechnology, NANO 2017).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Sub-15 nm nanowires enabled by cryo pulsed self-aligned nanotrench ablation on carbon nanotubes

AU - Deshmukh, Sanchit

AU - Lian, Feifei

AU - Yalon, Eilam

AU - Pitner, Gregory

AU - Wong, H. S.Philip

AU - Pop, Eric

PY - 2017/11/21

Y1 - 2017/11/21

N2 - Nanopatterning of features at current technology nodes requires expensive deep UV lithography or low throughput electron beam lithography. Here we demonstrate a modification of carbon nanotube (CNT) enabled self-aligned nanotrench ablation (SANTA) to achieve sub-15 nm dimensions for metal patterning. The technique utilizes nanoscale thermal transport within a typical polymer, in this case, poly-methyl methacrylate (PMMA) at cryogenic ambient temperatures (-120°C) for definition of highly scaled features. The technique shows promise for nanofabrication below sub-10 nm dimensions.

AB - Nanopatterning of features at current technology nodes requires expensive deep UV lithography or low throughput electron beam lithography. Here we demonstrate a modification of carbon nanotube (CNT) enabled self-aligned nanotrench ablation (SANTA) to achieve sub-15 nm dimensions for metal patterning. The technique utilizes nanoscale thermal transport within a typical polymer, in this case, poly-methyl methacrylate (PMMA) at cryogenic ambient temperatures (-120°C) for definition of highly scaled features. The technique shows promise for nanofabrication below sub-10 nm dimensions.

KW - carbon nanotubes

KW - finite element

KW - nanolithography

KW - nanoscale thermal transport

KW - nanowire

KW - self-aligned fabrication

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U2 - 10.1109/NANO.2017.8117470

DO - 10.1109/NANO.2017.8117470

M3 - منشور من مؤتمر

T3 - 2017 IEEE 17th International Conference on Nanotechnology, NANO 2017

SP - 489

EP - 490

BT - 2017 IEEE 17th International Conference on Nanotechnology, NANO 2017

T2 - 17th IEEE International Conference on Nanotechnology, NANO 2017

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ER -

Sub-15 nm nanowires enabled by cryo pulsed self-aligned nanotrench ablation on carbon nanotubes

Abstract

Publication series

Conference

UN SDGs

Keywords

All Science Journal Classification (ASJC) codes

Access to Document

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Cite this