@inproceedings{df8725c46f1c41afaf78dc8faf589f49,
title = "Sub-15 nm nanowires enabled by cryo pulsed self-aligned nanotrench ablation on carbon nanotubes",
abstract = "Nanopatterning of features at current technology nodes requires expensive deep UV lithography or low throughput electron beam lithography. Here we demonstrate a modification of carbon nanotube (CNT) enabled self-aligned nanotrench ablation (SANTA) to achieve sub-15 nm dimensions for metal patterning. The technique utilizes nanoscale thermal transport within a typical polymer, in this case, poly-methyl methacrylate (PMMA) at cryogenic ambient temperatures (-120°C) for definition of highly scaled features. The technique shows promise for nanofabrication below sub-10 nm dimensions.",
keywords = "carbon nanotubes, finite element, nanolithography, nanoscale thermal transport, nanowire, self-aligned fabrication",
author = "Sanchit Deshmukh and Feifei Lian and Eilam Yalon and Gregory Pitner and Wong, {H. S.Philip} and Eric Pop",
note = "Publisher Copyright: {\textcopyright} 2017 IEEE.; 17th IEEE International Conference on Nanotechnology, NANO 2017 ; Conference date: 25-07-2017 Through 28-07-2017",
year = "2017",
month = nov,
day = "21",
doi = "https://doi.org/10.1109/NANO.2017.8117470",
language = "الإنجليزيّة",
series = "2017 IEEE 17th International Conference on Nanotechnology, NANO 2017",
pages = "489--490",
booktitle = "2017 IEEE 17th International Conference on Nanotechnology, NANO 2017",
}