Sensitivity enhancement of silicon-photonics-based ultrasound sensor via BCB cladding

Resmi Ravi Kumar, Evgeny Hahamovich, Shai Tsesses, Yoav Hazan, Assaf Grinberg, Amir Rosenthal

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Low photo-elastic response of SOI sensors limits the development of optical detection of ultrasound. We demonstrate ultrasound sensitivity enhancement in silicon waveguides by BCB over-cladding replacing Silica.

Original languageEnglish
Title of host publicationCLEO
Subtitle of host publicationScience and Innovations, CLEO_SI 2019
DOIs
StatePublished - 2019
EventCLEO: Science and Innovations, CLEO_SI 2019 - San Jose, United States
Duration: 5 May 201910 May 2019

Publication series

NameOptics InfoBase Conference Papers
VolumePart F129-CLEO_SI 2019

Conference

ConferenceCLEO: Science and Innovations, CLEO_SI 2019
Country/TerritoryUnited States
CitySan Jose
Period5/05/1910/05/19

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Electronic, Optical and Magnetic Materials

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