Sensitivity Enhancement of Silicon-Photonics-Based Ultrasound Sensor via BCB Cladding

Resmi Ravi Kumar, Evgeny Hahamovich, Shai Tsesses, Yoav Hazan, Assaf Grinberg, Amir Rosenthal

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

Low photo-elastic response of SOI sensors limits the development of optical detection of ultrasound. We demonstrate ultrasound sensitivity enhancement in silicon waveguides by BCB over-cladding replacing Silica.

Original languageEnglish
Title of host publication2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings
ISBN (Electronic)9781943580576
DOIs
StatePublished - May 2019
Event2019 Conference on Lasers and Electro-Optics, CLEO 2019 - San Jose, United States
Duration: 5 May 201910 May 2019

Publication series

Name2019 Conference on Lasers and Electro-Optics, CLEO 2019 - Proceedings

Conference

Conference2019 Conference on Lasers and Electro-Optics, CLEO 2019
Country/TerritoryUnited States
CitySan Jose
Period5/05/1910/05/19

All Science Journal Classification (ASJC) codes

  • Spectroscopy
  • Industrial and Manufacturing Engineering
  • Safety, Risk, Reliability and Quality
  • Management, Monitoring, Policy and Law
  • Electronic, Optical and Magnetic Materials
  • Radiology Nuclear Medicine and imaging
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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