Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams

Lior Medina, Ashwin A. Seshia

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We report on an experimental demonstration of an open-loop self-excitation (OPSE) response in a microstructure composed of two initially curved and non-identical microbeams. One of the beams faces the electrode (beam #1), exposing it to displacement-dependent electrostatic loading, whilst the second beam (beam #2) experiences a 'mechanical', displacement-independent emanating from a truss set in between the two beams. The SE is triggered at high voltages, where one would expect to encounter a pull-in (PI) response. However, the presence of an SE appears to prevent a PI towards the electrode from occurring. The existence of an SE response, which can occur, regardless of any added modification to the circuit, suggests that such a response is an intrinsic feature of the microstructure.

Original languageEnglish
Title of host publication2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
ISBN (Electronic)9781665497183
DOIs
StatePublished - 2022
Event2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Paris, France
Duration: 24 Apr 202228 Apr 2022

Publication series

Name2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings

Conference

Conference2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022
Country/TerritoryFrance
CityParis
Period24/04/2228/04/22

Keywords

  • Electrostatic actuation
  • MEMS/NEMS
  • Pull-in
  • Quasi-static loading

All Science Journal Classification (ASJC) codes

  • Computer Networks and Communications
  • Signal Processing
  • Electronic, Optical and Magnetic Materials
  • Control and Optimization
  • Instrumentation

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