@inproceedings{6c49601f2760435694c33b40b7d05dd4,
title = "Self-Excitation in Electrostatically Actuated Non-Identical Coupled Curved Microbeams",
abstract = "We report on an experimental demonstration of an open-loop self-excitation (OPSE) response in a microstructure composed of two initially curved and non-identical microbeams. One of the beams faces the electrode (beam #1), exposing it to displacement-dependent electrostatic loading, whilst the second beam (beam #2) experiences a 'mechanical', displacement-independent emanating from a truss set in between the two beams. The SE is triggered at high voltages, where one would expect to encounter a pull-in (PI) response. However, the presence of an SE appears to prevent a PI towards the electrode from occurring. The existence of an SE response, which can occur, regardless of any added modification to the circuit, suggests that such a response is an intrinsic feature of the microstructure.",
keywords = "Electrostatic actuation, MEMS/NEMS, Pull-in, Quasi-static loading",
author = "Lior Medina and Seshia, {Ashwin A.}",
note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 ; Conference date: 24-04-2022 Through 28-04-2022",
year = "2022",
doi = "10.1109/EFTF/IFCS54560.2022.9850928",
language = "الإنجليزيّة",
series = "2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "2022 Joint Conference of the European Frequency and Time Forum and IEEE International Frequency Control Symposium, EFTF/IFCS 2022 - Proceedings",
address = "الولايات المتّحدة",
}