Selective stiffening for producing motion conversion mechanisms

Inbar Hotzen; Orna Ternyak; Shai Shmulevich; David Elata

doi:10.1016/j.proeng.2014.11.534

Selective stiffening for producing motion conversion mechanisms

Inbar Hotzen, Orna Ternyak, Shai Shmulevich, David Elata

Technion - Israel Institute of Technology

Research output: Contribution to journal › Conference article › peer-review

Abstract

We present a novel motion conversion mechanism which is fully compatible with standard mass-fabrication micromachining. The new mechanism is designed to linearly convert in-plane motion induced by electrostatic comb-drive actuators, to out-ofplane motion. The conversion mechanism is constructed from pairs of beams with two different heights. Motion conversion is achieved by fastening these beams together using a small number of rigid connectors. The rigid connectors stiffen the structure in-plane response, but induce an out-of-plane motion. We fabricated new test devices and demonstrated parallel out-of-plane motion of a flat stage.

Original language	English
Pages (from-to)	1589-1592
Number of pages	4
Journal	Procedia Engineering
Volume	87
DOIs	https://doi.org/10.1016/j.proeng.2014.11.534
State	Published - 2014
Event	28th European Conference on Solid-State Transducers, EUROSENSORS 2014 - Brescia, Italy Duration: 7 Sep 2014 → 10 Sep 2014

Keywords

Actuators
Motion conversion
Out-of-plane motion

All Science Journal Classification (ASJC) codes

General Engineering

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

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10.1016/j.proeng.2014.11.534

Cite this

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title = "Selective stiffening for producing motion conversion mechanisms",

abstract = "We present a novel motion conversion mechanism which is fully compatible with standard mass-fabrication micromachining. The new mechanism is designed to linearly convert in-plane motion induced by electrostatic comb-drive actuators, to out-ofplane motion. The conversion mechanism is constructed from pairs of beams with two different heights. Motion conversion is achieved by fastening these beams together using a small number of rigid connectors. The rigid connectors stiffen the structure in-plane response, but induce an out-of-plane motion. We fabricated new test devices and demonstrated parallel out-of-plane motion of a flat stage.",

keywords = "Actuators, Motion conversion, Out-of-plane motion",

author = "Inbar Hotzen and Orna Ternyak and Shai Shmulevich and David Elata",

note = "Publisher Copyright: {\textcopyright} 2014 Published by Elsevier Ltd.; 28th European Conference on Solid-State Transducers, EUROSENSORS 2014 ; Conference date: 07-09-2014 Through 10-09-2014",

year = "2014",

doi = "10.1016/j.proeng.2014.11.534",

language = "الإنجليزيّة",

volume = "87",

pages = "1589--1592",

journal = "Procedia Engineering",

issn = "1877-7058",

publisher = "Elsevier BV",

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TY - JOUR

T1 - Selective stiffening for producing motion conversion mechanisms

AU - Hotzen, Inbar

AU - Ternyak, Orna

AU - Shmulevich, Shai

AU - Elata, David

PY - 2014

Y1 - 2014

N2 - We present a novel motion conversion mechanism which is fully compatible with standard mass-fabrication micromachining. The new mechanism is designed to linearly convert in-plane motion induced by electrostatic comb-drive actuators, to out-ofplane motion. The conversion mechanism is constructed from pairs of beams with two different heights. Motion conversion is achieved by fastening these beams together using a small number of rigid connectors. The rigid connectors stiffen the structure in-plane response, but induce an out-of-plane motion. We fabricated new test devices and demonstrated parallel out-of-plane motion of a flat stage.

AB - We present a novel motion conversion mechanism which is fully compatible with standard mass-fabrication micromachining. The new mechanism is designed to linearly convert in-plane motion induced by electrostatic comb-drive actuators, to out-ofplane motion. The conversion mechanism is constructed from pairs of beams with two different heights. Motion conversion is achieved by fastening these beams together using a small number of rigid connectors. The rigid connectors stiffen the structure in-plane response, but induce an out-of-plane motion. We fabricated new test devices and demonstrated parallel out-of-plane motion of a flat stage.

KW - Actuators

KW - Motion conversion

KW - Out-of-plane motion

UR - http://www.scopus.com/inward/record.url?scp=84923356561&partnerID=8YFLogxK

U2 - 10.1016/j.proeng.2014.11.534

DO - 10.1016/j.proeng.2014.11.534

M3 - مقالة من مؤنمر

SN - 1877-7058

VL - 87

SP - 1589

EP - 1592

JO - Procedia Engineering

JF - Procedia Engineering

T2 - 28th European Conference on Solid-State Transducers, EUROSENSORS 2014

Y2 - 7 September 2014 through 10 September 2014

ER -

Selective stiffening for producing motion conversion mechanisms

Abstract

Keywords

All Science Journal Classification (ASJC) codes

UN SDGs

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