Selective Stiffening for Producing a Mass-Fabrication Compatible Motion Conversion Mechanism

Inbar Hotzen Grinberg, Orna Ternyak, Shai Shmulevich, David Elata

Research output: Contribution to journalArticlepeer-review


We present a mechanism that converts in-plane to out-of-plane motions, which is fully compatible with mass-fabrication processes. By using selective stiffening, we induce coupling between in-plane and out-of-plane responses of the mechanism. The conversion ratio is constant (i.e., linear response), and it can be easily tailored by the number of stiffeners used in an otherwise unchanged design planform. The linearity of the motion conversion and the possibility to tailor it, are demonstrated experimentally using dedicated test devices. As a specific example of application, we use the motion conversion mechanism to achieve a parallel out-of-plane motion of a flat stage, which is driven by in-plane comb-drives.

Original languageEnglish
Article number7268790
Pages (from-to)2101-2108
Number of pages8
JournalJournal of Microelectromechanical Systems
Issue number6
StatePublished - 1 Dec 2015


  • Motion conversion mechanism
  • asymmetric bending
  • out-of-plane motion
  • selective stiffening
  • slanted cross-section

All Science Journal Classification (ASJC) codes

  • Mechanical Engineering
  • Electrical and Electronic Engineering


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