Abstract
We study experimentally the effect of oxide removal on the sub-bandgap photodetection in silicon waveguides at the telecom wavelength regime. Depassivating the device allows for the enhancement of the quantum efficiency by about 2-3 times. Furthermore, the propagation loss within the device is significantly reduced by the oxide removal. Measuring the device 60 days after the depassivation shows slight differences. We provide a possible explanation for these observations. Clearly, passivation and depassivation play an essential role in the design and the implementation of such sub-bandgap photodetector devices for applications such as on-chip light monitoring.
Original language | English |
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Pages (from-to) | 2128-2131 |
Number of pages | 4 |
Journal | Optics Letters |
Volume | 45 |
Issue number | 7 |
DOIs | |
State | Published - 1 Apr 2020 |
All Science Journal Classification (ASJC) codes
- Atomic and Molecular Physics, and Optics