@inproceedings{617c3d8a5e794a2d852768908eab3d4d,
title = "Resonant pressure sensing using a micromechanical cantilever actuated by fringing electrostatic fields",
abstract = "We demonstrate a pressure-sensing approach based on the resonant operation of a single-crystal Si cantilever positioned near a flexible, pressurized membrane. The membrane deflection perturbs the electrostatic force acting on the cantilever and consequently alters the beam's resonant frequency. Sensitivity was enhanced by tailoring the actuating force nonlinearities through fringing electrostatic fields. With our coupled micromechanical system, we achieved frequency sensitivity to pressure and displacement of ≈ 30 Hz/kPa and -4 Hz/nm, respectively. Our results indicate that the suggested approach may have applications not only for pressure measurements, but also in a broad range of microelectromechanical resonant inertial, force, mass and bio sensors.",
author = "Naftaly Krakover and Hic, {B. Robert} and Slava Krylov",
note = "Publisher Copyright: {\textcopyright} 2018 IEEE.; 31st IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2018 ; Conference date: 21-01-2018 Through 25-01-2018",
year = "2018",
month = apr,
day = "24",
doi = "https://doi.org/10.1109/MEMSYS.2018.8346688",
language = "الإنجليزيّة",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
pages = "846--849",
booktitle = "2018 IEEE Micro Electro Mechanical Systems, MEMS 2018",
address = "الولايات المتّحدة",
}