@inproceedings{c99fd76af5b843cfa89f89b9a203b3d2,
title = "Resonant Accelerometer with Compliant Parallel Motion Linkage Force Amplification Mechanism",
abstract = "We report on a novel architecture of a resonant accelerometer incorporating four proof masses and a compliant parallel motion linkage as a force amplifier. A simple, Manhattan geometry, manufacturable, device is distinguished by low parasitic compliance and purely axial, lacking any bending, loading of the sensing beams. Silicon on insulator (SOI) devices were operated in open loop and in a non-differential mode, the acceleration was emulated by an electrostatic force. Consistently with the model prediction a sensitivity of ≈ 2.3 Hz/V2, which is equivalent to ≈ 417 Hz/g, was experimentally demonstrated in a Si device with ≈ 500 μm × 480 μm × 25 μm masses and 250 μm long and ≈ 1.5 μm wide resonant sensing beams.",
keywords = "compliant mechanism, electrostatic actuation, force amplification, resonant accelerometer",
author = "Omer Halevy and Stella Lulinsky and Slava Krylov",
note = "Publisher Copyright: {\textcopyright} 2021 IEEE.; 8th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2021 ; Conference date: 22-03-2021 Through 25-03-2021",
year = "2021",
month = mar,
day = "22",
doi = "https://doi.org/10.1109/INERTIAL51137.2021.9430489",
language = "الإنجليزيّة",
series = "INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "INERTIAL 2021 - 8th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",
address = "الولايات المتّحدة",
}