@inproceedings{bd52ed032cb048b0bca036fabbcb36cf,
title = "Real-time synchronous imaging of electromechanical resonator mode and equilibrium profiles",
abstract = "The single-shot interferometric imaging of normal mode dynamics in MEMS resonators, oscillating in the radio frequency (rf) regime, is demonstrated by synchronous imaging with a pulsed nanosecond laser. Profiles of mechanical modes in suspended silicon and graphene thin-film structures, and their extracted equilibrium profiles, are measured through nondestructive all-optical Fabry-Perot reflectance fits to the temporal traces. As a proof of principle, the modal patterns of a microdrum silicon resonator is analyzed, and its extracted vibration modes and equilibrium profile show good agreement with other characterization and numerical estimations.",
author = "Y. Linzon and D. Joe and Barton, {R. A.} and Ilic, {R. B.} and S. Krylov and Parpia, {J. M.} and Craighead, {H. G.}",
year = "2011",
doi = "10.1109/MEMSYS.2011.5734467",
language = "الإنجليزيّة",
isbn = "9781424496327",
series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",
pages = "485--488",
booktitle = "2011 IEEE 24th International Conference on Micro Electro Mechanical Systems, MEMS 2011",
note = "24th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2011 ; Conference date: 23-01-2011 Through 27-01-2011",
}