Real-time phase shift interference microscopy

Avner Safrani; Ibrahim Abdulhalim

doi:https://doi.org/10.1364/OL.39.005220

Real-time phase shift interference microscopy

Avner Safrani, Ibrahim Abdulhalim

Unit of Photonics and Electro-Optics Engineering

Ben-Gurion University of the Negev

Research output: Contribution to journal › Article › peer-review

Abstract

A real-time phase shift interference microscopy system is presented using a polarization-based Linnik interferometer operating with three synchronized, phase-masked, parallel detectors. Using this method, several important applications that require high speed and accuracy, such as dynamic focusing control, tilt measurement, submicrometer roughness measurement, and 3D profiling of fine structures, are demonstrated in 50 volumes per second and with 2 nm height repeatability.

Original language	English
Pages (from-to)	5220-5223
Number of pages	4
Journal	Optics Letters
Volume	39
Issue number	17
DOIs	https://doi.org/10.1364/OL.39.005220
State	Published - 1 Jan 2014

All Science Journal Classification (ASJC) codes

Atomic and Molecular Physics, and Optics

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https://doi.org/10.1364/OL.39.005220

Cite this

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title = "Real-time phase shift interference microscopy",

abstract = "A real-time phase shift interference microscopy system is presented using a polarization-based Linnik interferometer operating with three synchronized, phase-masked, parallel detectors. Using this method, several important applications that require high speed and accuracy, such as dynamic focusing control, tilt measurement, submicrometer roughness measurement, and 3D profiling of fine structures, are demonstrated in 50 volumes per second and with 2 nm height repeatability.",

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AB - A real-time phase shift interference microscopy system is presented using a polarization-based Linnik interferometer operating with three synchronized, phase-masked, parallel detectors. Using this method, several important applications that require high speed and accuracy, such as dynamic focusing control, tilt measurement, submicrometer roughness measurement, and 3D profiling of fine structures, are demonstrated in 50 volumes per second and with 2 nm height repeatability.

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DO - https://doi.org/10.1364/OL.39.005220

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JO - Optics Letters

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Real-time phase shift interference microscopy

Abstract

All Science Journal Classification (ASJC) codes

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