@inproceedings{67676f8baac64ec39e04f28bf8cba8bf,
title = "Quadrature optical interferometry based in-plane displacement measurement of a MEMS grating",
abstract = "In this work, we devise an optical interferometry setup to directly measure the in-plane displacement of a microelectromechanical systems (MEMS) optical shutter modulator by using the first diffraction order generated by a grating on its surface. We employ optical homodyne detection and a derivation of a Mach-Zehnder interferometer with a polarization-based quadrature detection architecture to demonstrate nanometric in-plane transient displacement sensitivity at >200 kHz. We present a quadrature grating interferometry method to measure in-plane transient displacement of high-frequency MEMS actuators using a normal incident beam, opening the way for future multi-axis displacement sensing.",
keywords = "Quadrature interferometry, homodyne detection, in-plane displacement",
author = "Rodrigues, {Manuel J.L.F.} and Garcia, {In{\^e}s S.} and Zeev Zalevsky and Dias, {Rosana A.} and Alves, {Filipe S.} and Aguiam, {Diogo E.}",
note = "Publisher Copyright: {\textcopyright} 2025 SPIE.; Photonic Instrumentation Engineering XII 2025 ; Conference date: 27-01-2025 Through 30-01-2025",
year = "2025",
doi = "10.1117/12.3042893",
language = "الإنجليزيّة",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Busse, {Lynda E.} and Yakov Soskind",
booktitle = "Photonic Instrumentation Engineering XII",
address = "الولايات المتّحدة",
}