@inproceedings{039e36c3572e46d9bc34a0c65f676e0c,
title = "Portable spatially incoherent holography for optical profiling of sharp-edge objects",
abstract = "We present a compact and external common-path off-axis interferometer with spatially incoherent illumination, and demonstrate using it for profiling semiconductor silicon wafers with sharp-edge contacts.",
author = "Amit Nativ and Shaked, {Natan T.}",
note = "Publisher Copyright: {\textcopyright} OSA 2016.; Digital Holography and Three-Dimensional Imaging, DH 2016 ; Conference date: 25-07-2016 Through 28-07-2016",
year = "2016",
month = jul,
day = "18",
doi = "https://doi.org/10.1364/DH.2016.DTh3C.5",
language = "الإنجليزيّة",
isbn = "9781943580156",
series = "Optics InfoBase Conference Papers",
publisher = "Optica Publishing Group (formerly OSA)",
booktitle = "Digital Holography and Three-Dimensional Imaging, DH 2016",
}