Abstract
We integrate elliptical planar Hall effect (PHE) magnetometers with optimized high permeability magnetic flux concentrators. The integrated magnetometers exhibit at room temperature an equivalent magnetic noise of ∼5 pT/√Hz at 10 Hz, 7.4 pT/√Hz at 1 Hz, and better than 100 pT/√Hz at 10 mHz. The results constitute more than an order of magnitude improvement over previously reported state-of-the-art PHE magnetometers, and demonstrate, for the first time, the ability of a magnetoresistive sensor to match the performance of state-of-the-art, high-end flux-gate, and miniature atomic magnetometers.
| Original language | English |
|---|---|
| Article number | 8871164 |
| Journal | IEEE Sensors Letters |
| Volume | 3 |
| Issue number | 12 |
| DOIs | |
| State | Published - 1 Dec 2019 |
Keywords
- Magnetic sensors
- equivalent magnetic noise (EMN)
- magnetometer
- planar Hall effect (PHE)
All Science Journal Classification (ASJC) codes
- Instrumentation
- Electrical and Electronic Engineering