Planar Hall Effect Magnetometer with 5 pT Resolution

Hariharan Nhalil, Tzahi Givon, Proloy Taran Das, Nir Hasidim, Vladislav Mor, Moty Schultz, Shai Amrusi, Lior Klein, Asaf Grosz

Research output: Contribution to journalArticlepeer-review

Abstract

We integrate elliptical planar Hall effect (PHE) magnetometers with optimized high permeability magnetic flux concentrators. The integrated magnetometers exhibit at room temperature an equivalent magnetic noise of ∼5 pT/√Hz at 10 Hz, 7.4 pT/√Hz at 1 Hz, and better than 100 pT/√Hz at 10 mHz. The results constitute more than an order of magnitude improvement over previously reported state-of-the-art PHE magnetometers, and demonstrate, for the first time, the ability of a magnetoresistive sensor to match the performance of state-of-the-art, high-end flux-gate, and miniature atomic magnetometers.

Original languageEnglish
Article number8871164
JournalIEEE Sensors Letters
Volume3
Issue number12
DOIs
StatePublished - 1 Dec 2019

Keywords

  • Magnetic sensors
  • equivalent magnetic noise (EMN)
  • magnetometer
  • planar Hall effect (PHE)

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Electrical and Electronic Engineering

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