Photoconductive Switching of a High-Voltage Actuator Array

Vesna Bacheva; Edouard Leroy; Shai Shmulevich; Aiste Balciunaite; Diana Davila; Eleonore Cauquil; Israel Gabay; Iago Pereiro; Herbert Shea; Govind V. Kaigala; Moran Bercovici

doi:10.1109/MEMS51670.2022.9699795

Photoconductive Switching of a High-Voltage Actuator Array

Vesna Bacheva, Edouard Leroy, Shai Shmulevich, Aiste Balciunaite, Diana Davila, Eleonore Cauquil, Israel Gabay, Iago Pereiro, Herbert Shea, Govind V. Kaigala, Moran Bercovici

Mechanical Engineering

Technion - Israel Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present a method to control individual high-voltage actuators in an array using microfabricated photoconductive switches and a light projection system, thus overcoming the challenges of on-chip control at high voltages. Such switching capabilities go beyond actuators - our proposed approach may open the door to the ple control of other high-voltage processes, such as MEMS, pressure sensors, and RF devices.

Original language	English
Title of host publication	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Pages	220-222
Number of pages	3
ISBN (Electronic)	9781665409117
DOIs	https://doi.org/10.1109/MEMS51670.2022.9699795
State	Published - 2022
Event	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 - Tokyo, Japan Duration: 9 Jan 2022 → 13 Jan 2022

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
Volume	2022-January

Conference

Conference	35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022
Country/Territory	Japan
City	Tokyo
Period	9/01/22 → 13/01/22

Keywords

Voltage control
actuators
amorphous silicon
photoconductor
photocontrol

All Science Journal Classification (ASJC) codes

Hardware and Architecture
Electrical and Electronic Engineering

Access to Document

10.1109/MEMS51670.2022.9699795

Cite this

Bacheva, V., Leroy, E., Shmulevich, S., Balciunaite, A., Davila, D., Cauquil, E., Gabay, I., Pereiro, I., Shea, H., Kaigala, G. V., & Bercovici, M. (2022). Photoconductive Switching of a High-Voltage Actuator Array. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 (pp. 220-222). (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January). https://doi.org/10.1109/MEMS51670.2022.9699795

@inproceedings{d8af3ca2370a4d00915aa4316b3c1108,

title = "Photoconductive Switching of a High-Voltage Actuator Array",

abstract = "We present a method to control individual high-voltage actuators in an array using microfabricated photoconductive switches and a light projection system, thus overcoming the challenges of on-chip control at high voltages. Such switching capabilities go beyond actuators - our proposed approach may open the door to the ple control of other high-voltage processes, such as MEMS, pressure sensors, and RF devices.",

keywords = "Voltage control, actuators, amorphous silicon, photoconductor, photocontrol",

author = "Vesna Bacheva and Edouard Leroy and Shai Shmulevich and Aiste Balciunaite and Diana Davila and Eleonore Cauquil and Israel Gabay and Iago Pereiro and Herbert Shea and Kaigala, {Govind V.} and Moran Bercovici",

note = "Publisher Copyright: {\textcopyright} 2022 IEEE.; 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022 ; Conference date: 09-01-2022 Through 13-01-2022",

year = "2022",

doi = "10.1109/MEMS51670.2022.9699795",

language = "الإنجليزيّة",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "220--222",

booktitle = "35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022",

}

Bacheva, V, Leroy, E, Shmulevich, S, Balciunaite, A, Davila, D, Cauquil, E, Gabay, I, Pereiro, I, Shea, H, Kaigala, GV & Bercovici, M 2022, Photoconductive Switching of a High-Voltage Actuator Array. in 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), vol. 2022-January, pp. 220-222, 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022, Tokyo, Japan, 9/01/22. https://doi.org/10.1109/MEMS51670.2022.9699795

Photoconductive Switching of a High-Voltage Actuator Array. / Bacheva, Vesna; Leroy, Edouard; Shmulevich, Shai et al.
35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. 2022. p. 220-222 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS); Vol. 2022-January).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Photoconductive Switching of a High-Voltage Actuator Array

AU - Bacheva, Vesna

AU - Leroy, Edouard

AU - Shmulevich, Shai

AU - Balciunaite, Aiste

AU - Davila, Diana

AU - Cauquil, Eleonore

AU - Gabay, Israel

AU - Pereiro, Iago

AU - Shea, Herbert

AU - Kaigala, Govind V.

AU - Bercovici, Moran

PY - 2022

Y1 - 2022

N2 - We present a method to control individual high-voltage actuators in an array using microfabricated photoconductive switches and a light projection system, thus overcoming the challenges of on-chip control at high voltages. Such switching capabilities go beyond actuators - our proposed approach may open the door to the ple control of other high-voltage processes, such as MEMS, pressure sensors, and RF devices.

AB - We present a method to control individual high-voltage actuators in an array using microfabricated photoconductive switches and a light projection system, thus overcoming the challenges of on-chip control at high voltages. Such switching capabilities go beyond actuators - our proposed approach may open the door to the ple control of other high-voltage processes, such as MEMS, pressure sensors, and RF devices.

KW - Voltage control

KW - actuators

KW - amorphous silicon

KW - photoconductor

KW - photocontrol

UR - http://www.scopus.com/inward/record.url?scp=85126396091&partnerID=8YFLogxK

U2 - 10.1109/MEMS51670.2022.9699795

DO - 10.1109/MEMS51670.2022.9699795

M3 - منشور من مؤتمر

T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

SP - 220

EP - 222

BT - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

T2 - 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022

Y2 - 9 January 2022 through 13 January 2022

ER -

Bacheva V, Leroy E, Shmulevich S, Balciunaite A, Davila D, Cauquil E et al. Photoconductive Switching of a High-Voltage Actuator Array. In 35th IEEE International Conference on Micro Electro Mechanical Systems Conference, MEMS 2022. 2022. p. 220-222. (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). doi: 10.1109/MEMS51670.2022.9699795

Photoconductive Switching of a High-Voltage Actuator Array

Abstract

Publication series

Conference

Keywords

All Science Journal Classification (ASJC) codes

Access to Document

Other files and links

Fingerprint

Cite this