Parallel array of planar Hall effect sensors for high resolution magnetometry

Hariharan Nhalil; Moty Schultz; Shai Amrusi; Asaf Grosz; Lior Klein

doi:10.1063/5.0151569

Parallel array of planar Hall effect sensors for high resolution magnetometry

Hariharan Nhalil, Moty Schultz, Shai Amrusi, Asaf Grosz, Lior Klein

Ben-Gurion University of the Negev, Bar-Ilan University

Research output: Contribution to journal › Article › peer-review

Abstract

We introduce a planar Hall effect magnetometer in the form of a parallel array of permalloy-based elliptical sensors. The number of ellipses in the array and other fabrication parameters are optimized with the support of numerical simulations. We obtain equivalent magnetic noise (EMN) of 16 pT/Hz at 100 Hz, 25 pT/Hz at 10 Hz, 98 pT/Hz at 1 Hz, and 470 pT/Hz at 0.1 Hz. The exceptional EMN without the use of magnetic flux concentrators highlights the advantages of the design. The presented magnetometer, characterized by its simplicity, affordability, and ability to operate at room temperature, is anticipated to be useful for applications requiring pT resolution.

Original language	American English
Article number	204501
Number of pages	6
Journal	Journal of Applied Physics
Volume	133
Issue number	20
DOIs	https://doi.org/10.1063/5.0151569
State	Published - 28 May 2023

All Science Journal Classification (ASJC) codes

General Physics and Astronomy

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abstract = "We introduce a planar Hall effect magnetometer in the form of a parallel array of permalloy-based elliptical sensors. The number of ellipses in the array and other fabrication parameters are optimized with the support of numerical simulations. We obtain equivalent magnetic noise (EMN) of 16 pT/Hz at 100 Hz, 25 pT/Hz at 10 Hz, 98 pT/Hz at 1 Hz, and 470 pT/Hz at 0.1 Hz. The exceptional EMN without the use of magnetic flux concentrators highlights the advantages of the design. The presented magnetometer, characterized by its simplicity, affordability, and ability to operate at room temperature, is anticipated to be useful for applications requiring pT resolution.",

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AU - Nhalil, Hariharan

AU - Schultz, Moty

AU - Amrusi, Shai

AU - Grosz, Asaf

AU - Klein, Lior

PY - 2023/5/28

Y1 - 2023/5/28

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AB - We introduce a planar Hall effect magnetometer in the form of a parallel array of permalloy-based elliptical sensors. The number of ellipses in the array and other fabrication parameters are optimized with the support of numerical simulations. We obtain equivalent magnetic noise (EMN) of 16 pT/Hz at 100 Hz, 25 pT/Hz at 10 Hz, 98 pT/Hz at 1 Hz, and 470 pT/Hz at 0.1 Hz. The exceptional EMN without the use of magnetic flux concentrators highlights the advantages of the design. The presented magnetometer, characterized by its simplicity, affordability, and ability to operate at room temperature, is anticipated to be useful for applications requiring pT resolution.

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Parallel array of planar Hall effect sensors for high resolution magnetometry

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