Parabolic tapered photonic crystal cavity in silicon

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Abstract

We demonstrate the design, fabrication, transmission spectrum measurement, and near-field characterization of a parabolic tapered one-dimensional photonic crystal cavity in silicon. The results shows a relatively high quality factor (∼43 000), together with a small modal volume of ∼ 1. 1 (λ/n) 3. Moreover, the design allows repeatable device fabrication, as evident by the similar characteristics obtained for several tens of devices that were fabricated and tested. These demonstrated 1D PhC cavities may be used as a building block in integrated photonic circuits for optical on-chip interconnects and sensing applications.

Original languageEnglish
Article number041112
JournalApplied Physics Letters
Volume100
Issue number4
DOIs
StatePublished - 23 Jan 2012

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy (miscellaneous)

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