Abstract
We demonstrate the design, fabrication, transmission spectrum measurement, and near-field characterization of a parabolic tapered one-dimensional photonic crystal cavity in silicon. The results shows a relatively high quality factor (∼43 000), together with a small modal volume of ∼ 1. 1 (λ/n) 3. Moreover, the design allows repeatable device fabrication, as evident by the similar characteristics obtained for several tens of devices that were fabricated and tested. These demonstrated 1D PhC cavities may be used as a building block in integrated photonic circuits for optical on-chip interconnects and sensing applications.
| Original language | English |
|---|---|
| Article number | 041112 |
| Journal | Applied Physics Letters |
| Volume | 100 |
| Issue number | 4 |
| DOIs | |
| State | Published - 23 Jan 2012 |
All Science Journal Classification (ASJC) codes
- Physics and Astronomy (miscellaneous)