@inproceedings{84628fd60ccc41189aa7e495226a1c74,
title = "Optical waveguide on silicon made by zone melting method",
abstract = "In this paper we introduce a novel method of making micro-waveguides on silicon surface by the use of the Zone Refining Method. We produce the melting zone by a laser beam focused on the surface of a doped silicon slab to create a melting spot on its surface. By moving the melt zone across the silicon sample we can write a path of higher index of refraction on the silicon. The depth and the width of the waveguide can be determined by the wavelength and the spot diameter of the laser, respectively. We demonstrate the production of 1X4 μm2 channel on the silicon, by using 532 nm laser beam. This method can be applied in microelectronics for the manufacture of light waveguides on integrated optoelectronics ICs.",
keywords = "Impurities, Micro-waveguides, Plasma dispersion, Silicon, Zone refining",
author = "Uriel Hanuka and Yair Zigman and Maor Tiferet and Zeev Zalevsky and Moshe Sinvani",
note = "Publisher Copyright: {\textcopyright} 2020 SPIE.; Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV 2020 ; Conference date: 03-02-2020 Through 05-02-2020",
year = "2020",
doi = "10.1117/12.2545949",
language = "الإنجليزيّة",
series = "Proceedings of SPIE - The International Society for Optical Engineering",
publisher = "SPIE",
editor = "Gediminas Raciukaitis and Carlos Molpeceres and Jie Qiao and Aiko Narazaki",
booktitle = "Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXV",
address = "الولايات المتّحدة",
}