Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We demonstrate an open-loop self-excitation response in a curved, bistable microelectromechanical beam under a time-independent electrostatic load. The self-excitation is triggered by placing a high value resistor in series with a beam that is on the verge of bistability. The voltage-deflection curve of such a beam contains an inflection point, where the slope of the curve is approximately zero. Our results show that actuation at a voltage corresponding to the inflection point induces stable self-sustained oscillations. We further observe that implementation of the same actuation scenario in a bistable beam, with the voltage-deflection curve containing two stable branches, does not lead to self-excitation.

Original languageEnglish
Title of host publication2017 IEEE 30th International Conference on Micro Electro Mechanical Systems, MEMS 2017
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages785-788
Number of pages4
ISBN (Electronic)9781509050789
DOIs
StatePublished - 23 Feb 2017
Event30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017 - Las Vegas, United States
Duration: 22 Jan 201726 Jan 2017

Publication series

NameProceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Conference

Conference30th IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2017
Country/TerritoryUnited States
CityLas Vegas
Period22/01/1726/01/17

Keywords

  • Bistability
  • Curved micromechanical beam
  • Electrostatic actuation
  • MEMS/NEMS
  • Self-excitation

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Mechanical Engineering
  • Electrical and Electronic Engineering

Fingerprint

Dive into the research topics of 'Open-loop, self-excitation in a bistable micromechanical beam actuated by a DC electrostatic load'. Together they form a unique fingerprint.

Cite this