Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators

Ben Rivlin; Shai Shmulevich; Aharon Joffe; David Elata

doi:https://doi.org/10.1109/EuroSimE.2015.7103156

Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators

Ben Rivlin, Shai Shmulevich, Aharon Joffe, David Elata

Mechanical Engineering

Technion - Israel Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We show that nonlinear elastic springs can be used to counteract the nonlinearity of electrostatic forces in gap-closing electrostatic actuators. We demonstrate this in two types of devices. In the first, we use a nonlinear spring to extend the stable range of the parallel-plates actuator, and to ensure that the response in this extended range is linear by design. In the second device, we use a nonlinear spring to ensure that beyond what would have been the pull-in point, voltage remains constant and independent of charge. In effect, this second device is a rechargeable mechanical battery.

Original language	English
Title of host publication	2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015
ISBN (Electronic)	9781479999507
DOIs	https://doi.org/10.1109/EuroSimE.2015.7103156
State	Published - 6 May 2015
Event	2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015 - Budapest, Hungary Duration: 19 Apr 2015 → 22 Apr 2015

Publication series

Name	2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015

Conference

Conference	2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015
Country/Territory	Hungary
City	Budapest
Period	19/04/15 → 22/04/15

All Science Journal Classification (ASJC) codes

Computational Theory and Mathematics
Electrical and Electronic Engineering
Control and Systems Engineering
Industrial and Manufacturing Engineering

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https://doi.org/10.1109/EuroSimE.2015.7103156

Cite this

Rivlin, B., Shmulevich, S., Joffe, A., & Elata, D. (2015). Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators. In 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015 Article 7103156 (2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015). https://doi.org/10.1109/EuroSimE.2015.7103156

Rivlin, Ben ; Shmulevich, Shai ; Joffe, Aharon et al. / Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators. 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015. 2015. (2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015).

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title = "Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators",

abstract = "We show that nonlinear elastic springs can be used to counteract the nonlinearity of electrostatic forces in gap-closing electrostatic actuators. We demonstrate this in two types of devices. In the first, we use a nonlinear spring to extend the stable range of the parallel-plates actuator, and to ensure that the response in this extended range is linear by design. In the second device, we use a nonlinear spring to ensure that beyond what would have been the pull-in point, voltage remains constant and independent of charge. In effect, this second device is a rechargeable mechanical battery.",

author = "Ben Rivlin and Shai Shmulevich and Aharon Joffe and David Elata",

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year = "2015",

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Rivlin, B, Shmulevich, S, Joffe, A & Elata, D 2015, Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators. in 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015., 7103156, 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015, 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015, Budapest, Hungary, 19/04/15. https://doi.org/10.1109/EuroSimE.2015.7103156

Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators. / Rivlin, Ben; Shmulevich, Shai; Joffe, Aharon et al.
2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015. 2015. 7103156 (2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators

AU - Rivlin, Ben

AU - Shmulevich, Shai

AU - Joffe, Aharon

AU - Elata, David

PY - 2015/5/6

Y1 - 2015/5/6

N2 - We show that nonlinear elastic springs can be used to counteract the nonlinearity of electrostatic forces in gap-closing electrostatic actuators. We demonstrate this in two types of devices. In the first, we use a nonlinear spring to extend the stable range of the parallel-plates actuator, and to ensure that the response in this extended range is linear by design. In the second device, we use a nonlinear spring to ensure that beyond what would have been the pull-in point, voltage remains constant and independent of charge. In effect, this second device is a rechargeable mechanical battery.

AB - We show that nonlinear elastic springs can be used to counteract the nonlinearity of electrostatic forces in gap-closing electrostatic actuators. We demonstrate this in two types of devices. In the first, we use a nonlinear spring to extend the stable range of the parallel-plates actuator, and to ensure that the response in this extended range is linear by design. In the second device, we use a nonlinear spring to ensure that beyond what would have been the pull-in point, voltage remains constant and independent of charge. In effect, this second device is a rechargeable mechanical battery.

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U2 - https://doi.org/10.1109/EuroSimE.2015.7103156

DO - https://doi.org/10.1109/EuroSimE.2015.7103156

M3 - منشور من مؤتمر

T3 - 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015

BT - 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015

T2 - 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015

Y2 - 19 April 2015 through 22 April 2015

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Rivlin B, Shmulevich S, Joffe A, Elata D. Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators. In 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015. 2015. 7103156. (2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015). doi: https://doi.org/10.1109/EuroSimE.2015.7103156

Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators

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