TY - GEN
T1 - Nonlinear mechanical springs for counteracting nonlinearities in gap-closing electrostatic actuators
AU - Rivlin, Ben
AU - Shmulevich, Shai
AU - Joffe, Aharon
AU - Elata, David
N1 - Publisher Copyright: © 2015 IEEE.
PY - 2015/5/6
Y1 - 2015/5/6
N2 - We show that nonlinear elastic springs can be used to counteract the nonlinearity of electrostatic forces in gap-closing electrostatic actuators. We demonstrate this in two types of devices. In the first, we use a nonlinear spring to extend the stable range of the parallel-plates actuator, and to ensure that the response in this extended range is linear by design. In the second device, we use a nonlinear spring to ensure that beyond what would have been the pull-in point, voltage remains constant and independent of charge. In effect, this second device is a rechargeable mechanical battery.
AB - We show that nonlinear elastic springs can be used to counteract the nonlinearity of electrostatic forces in gap-closing electrostatic actuators. We demonstrate this in two types of devices. In the first, we use a nonlinear spring to extend the stable range of the parallel-plates actuator, and to ensure that the response in this extended range is linear by design. In the second device, we use a nonlinear spring to ensure that beyond what would have been the pull-in point, voltage remains constant and independent of charge. In effect, this second device is a rechargeable mechanical battery.
UR - http://www.scopus.com/inward/record.url?scp=84944790000&partnerID=8YFLogxK
U2 - https://doi.org/10.1109/EuroSimE.2015.7103156
DO - https://doi.org/10.1109/EuroSimE.2015.7103156
M3 - منشور من مؤتمر
T3 - 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015
BT - 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015
T2 - 2015 16th International Conference on Thermal, Mechanical and Multi-Physics Simulation and Experiments in Microelectronics and Microsystems, EuroSimE 2015
Y2 - 19 April 2015 through 22 April 2015
ER -