TY - GEN
T1 - Nanoscale topography approximation using an autoresonating nanowire
AU - Baruch, E.
AU - Bucher, I.
N1 - Publisher Copyright: © 2022 Proceedings of ISMA 2022 - International Conference on Noise and Vibration Engineering and USD 2022 - International Conference on Uncertainty in Structural Dynamics. All rights reserved.
PY - 2022
Y1 - 2022
N2 - Nanoscale metrology is an important factor in the microchip industry, setting the limit to the degree of complexity of manufactured circuits. Atomic Force Microscopy (AFM) is a central method of nanoscale metrology, which utilizes Van der Waals (VdW) interaction forces between a tip connected to a beam and the measured specimen. One of AFM metrology's limitations is its inability to reproduce complex topographies due to the size of the interacting tip. The present research proposes to substitute the AFM tip with a nanowire, allowing the insertion of the nanowire into complex topographies and the measurement of the VdW interactions. By incrementally moving the nanowire and resonating it, it is possible to reproduce the distributed VdW interactions between the beam and the specimen, and consequently, accurately approximate the specimen's topography. This method is validated on an up-scaled magnetic experimental system, which substitutes the VdW potential with magnetic forces.
AB - Nanoscale metrology is an important factor in the microchip industry, setting the limit to the degree of complexity of manufactured circuits. Atomic Force Microscopy (AFM) is a central method of nanoscale metrology, which utilizes Van der Waals (VdW) interaction forces between a tip connected to a beam and the measured specimen. One of AFM metrology's limitations is its inability to reproduce complex topographies due to the size of the interacting tip. The present research proposes to substitute the AFM tip with a nanowire, allowing the insertion of the nanowire into complex topographies and the measurement of the VdW interactions. By incrementally moving the nanowire and resonating it, it is possible to reproduce the distributed VdW interactions between the beam and the specimen, and consequently, accurately approximate the specimen's topography. This method is validated on an up-scaled magnetic experimental system, which substitutes the VdW potential with magnetic forces.
UR - http://www.scopus.com/inward/record.url?scp=85195913718&partnerID=8YFLogxK
M3 - منشور من مؤتمر
T3 - Proceedings of ISMA 2022 - International Conference on Noise and Vibration Engineering and USD 2022 - International Conference on Uncertainty in Structural Dynamics
SP - 1127
EP - 1138
BT - Proceedings of ISMA 2022 - International Conference on Noise and Vibration Engineering and USD 2022 - International Conference on Uncertainty in Structural Dynamics
A2 - Desmet, W.
A2 - Pluymers, B.
A2 - Moens, D.
A2 - Neeckx, S.
PB - KU Leuven, Departement Werktuigkunde
T2 - 30th International Conference on Noise and Vibration Engineering, ISMA 2022 and 9th International Conference on Uncertainty in Structural Dynamics, USD 2022
Y2 - 12 September 2022 through 14 September 2022
ER -