Multiarray Micromachined Probe for Turbulence Measurements Assembled of Suspended Hot-Film Sensors

Youry Borisenkov; Michael Kholmyansky; Slava Krylov; Alex Liberzon; Arkady Tsinober

doi:10.1109/JMEMS.2015.2417213

Multiarray Micromachined Probe for Turbulence Measurements Assembled of Suspended Hot-Film Sensors

Youry Borisenkov, Michael Kholmyansky, Slava Krylov, Alex Liberzon, Arkady Tsinober

Tel Aviv University

Research output: Contribution to journal › Article › peer-review

Abstract

To meet the need to access experimentally the full tensor of velocity derivatives at smallest scales of turbulent flows, we developed, fabricated, and tested an out-of-plane micromachined hot-film sensor that has a suspended 100-nm thick sensing element. We present a unique multiarray hot-film probe as an assembly of five arrays of four sensors each. Experimental results demonstrate the improved resolution of the sensor compared with a conventional hot-wire and to a nonsuspended version of such a sensor. A simple and clear method for sensor spatial resolution evaluation is also discussed.

Original language	English
Article number	7081370
Pages (from-to)	1503-1509
Number of pages	7
Journal	Journal of Microelectromechanical Systems
Volume	24
Issue number	5
DOIs	https://doi.org/10.1109/JMEMS.2015.2417213
State	Published - Oct 2015

Keywords

Microelectromechanical devices
anemometers
thin film devices.
velocity measurements

All Science Journal Classification (ASJC) codes

Mechanical Engineering
Electrical and Electronic Engineering

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10.1109/JMEMS.2015.2417213

Cite this

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title = "Multiarray Micromachined Probe for Turbulence Measurements Assembled of Suspended Hot-Film Sensors",

abstract = "To meet the need to access experimentally the full tensor of velocity derivatives at smallest scales of turbulent flows, we developed, fabricated, and tested an out-of-plane micromachined hot-film sensor that has a suspended 100-nm thick sensing element. We present a unique multiarray hot-film probe as an assembly of five arrays of four sensors each. Experimental results demonstrate the improved resolution of the sensor compared with a conventional hot-wire and to a nonsuspended version of such a sensor. A simple and clear method for sensor spatial resolution evaluation is also discussed.",

keywords = "Microelectromechanical devices, anemometers, thin film devices., velocity measurements",

author = "Youry Borisenkov and Michael Kholmyansky and Slava Krylov and Alex Liberzon and Arkady Tsinober",

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year = "2015",

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doi = "10.1109/JMEMS.2015.2417213",

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AU - Krylov, Slava

AU - Liberzon, Alex

AU - Tsinober, Arkady

PY - 2015/10

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AB - To meet the need to access experimentally the full tensor of velocity derivatives at smallest scales of turbulent flows, we developed, fabricated, and tested an out-of-plane micromachined hot-film sensor that has a suspended 100-nm thick sensing element. We present a unique multiarray hot-film probe as an assembly of five arrays of four sensors each. Experimental results demonstrate the improved resolution of the sensor compared with a conventional hot-wire and to a nonsuspended version of such a sensor. A simple and clear method for sensor spatial resolution evaluation is also discussed.

KW - Microelectromechanical devices

KW - anemometers

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KW - velocity measurements

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JO - Journal of Microelectromechanical Systems

JF - Journal of Microelectromechanical Systems

IS - 5

M1 - 7081370

ER -

Multiarray Micromachined Probe for Turbulence Measurements Assembled of Suspended Hot-Film Sensors

Abstract

Keywords

All Science Journal Classification (ASJC) codes

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