Metal Oxide Heterostructure Array via Spatially Controlled–Growth within Block Copolymer Templates

Rotem Azoulay, Neta Shomrat, Inbal Weisbord, Galit Atiya, Tamar Segal-Peretz

Research output: Contribution to journalArticlepeer-review


Nanofabrication is continuously searching for new methodologies to fabricate 3D nanostructures with 3D control over their chemical composition. A new approach for heterostructure nanorod array fabrication through spatially controlled–growth of multiple metal oxides within block copolymer (BCP) templates is presented. Selective growth of metal oxides within the cylindrical polymer domains of polystyrene-block-poly methyl methacrylate is performed using sequential infiltration synthesis (SIS). Tuning the diffusion of trimethyl aluminum and diethyl zinc organometallic precursors in the BCP film directs the growth of AlOx and ZnO to different locations within the cylindrical BCP domains, in a single SIS process. BCP removal yields an AlOx-ZnO heterostructure nanorods array, as corroborated by 3D characterization with scanning transmission electron microscopy (STEM) tomography and a combination of STEM and energy-dispersive X-ray spectroscopy tomography. The strategy presented here will open up new routes for complex 3D nanostructure fabrication.

Original languageEnglish
Article number1904657
Issue number51
StatePublished - 1 Dec 2019


  • block copolymers
  • heterostructures
  • nanofabrication
  • sequential infiltration synthesis

All Science Journal Classification (ASJC) codes

  • Biotechnology
  • Biomaterials
  • Chemistry(all)
  • Materials Science(all)


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