Metal Oxide Heterostructure Array via Spatially Controlled–Growth within Block Copolymer Templates

Rotem Azoulay; Neta Shomrat; Inbal Weisbord; Galit Atiya; Tamar Segal-Peretz

doi:https://doi.org/10.1002/smll.201904657

Metal Oxide Heterostructure Array via Spatially Controlled–Growth within Block Copolymer Templates

Rotem Azoulay, Neta Shomrat, Inbal Weisbord, Galit Atiya, Tamar Segal-Peretz

Technion - Israel Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

Nanofabrication is continuously searching for new methodologies to fabricate 3D nanostructures with 3D control over their chemical composition. A new approach for heterostructure nanorod array fabrication through spatially controlled–growth of multiple metal oxides within block copolymer (BCP) templates is presented. Selective growth of metal oxides within the cylindrical polymer domains of polystyrene-block-poly methyl methacrylate is performed using sequential infiltration synthesis (SIS). Tuning the diffusion of trimethyl aluminum and diethyl zinc organometallic precursors in the BCP film directs the growth of AlO_x and ZnO to different locations within the cylindrical BCP domains, in a single SIS process. BCP removal yields an AlO_x-ZnO heterostructure nanorods array, as corroborated by 3D characterization with scanning transmission electron microscopy (STEM) tomography and a combination of STEM and energy-dispersive X-ray spectroscopy tomography. The strategy presented here will open up new routes for complex 3D nanostructure fabrication.

Original language	English
Article number	1904657
Journal	Small
Volume	15
Issue number	51
DOIs	https://doi.org/10.1002/smll.201904657
State	Published - 1 Dec 2019

Keywords

block copolymers
heterostructures
nanofabrication
sequential infiltration synthesis

All Science Journal Classification (ASJC) codes

Biotechnology
Biomaterials
Chemistry(all)
Materials Science(all)

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https://doi.org/10.1002/smll.201904657

Cite this

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title = "Metal Oxide Heterostructure Array via Spatially Controlled–Growth within Block Copolymer Templates",

abstract = "Nanofabrication is continuously searching for new methodologies to fabricate 3D nanostructures with 3D control over their chemical composition. A new approach for heterostructure nanorod array fabrication through spatially controlled–growth of multiple metal oxides within block copolymer (BCP) templates is presented. Selective growth of metal oxides within the cylindrical polymer domains of polystyrene-block-poly methyl methacrylate is performed using sequential infiltration synthesis (SIS). Tuning the diffusion of trimethyl aluminum and diethyl zinc organometallic precursors in the BCP film directs the growth of AlOx and ZnO to different locations within the cylindrical BCP domains, in a single SIS process. BCP removal yields an AlOx-ZnO heterostructure nanorods array, as corroborated by 3D characterization with scanning transmission electron microscopy (STEM) tomography and a combination of STEM and energy-dispersive X-ray spectroscopy tomography. The strategy presented here will open up new routes for complex 3D nanostructure fabrication.",

keywords = "block copolymers, heterostructures, nanofabrication, sequential infiltration synthesis",

author = "Rotem Azoulay and Neta Shomrat and Inbal Weisbord and Galit Atiya and Tamar Segal-Peretz",

note = "Publisher Copyright: {\textcopyright} 2019 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim",

year = "2019",

month = dec,

day = "1",

doi = "https://doi.org/10.1002/smll.201904657",

language = "الإنجليزيّة",

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T1 - Metal Oxide Heterostructure Array via Spatially Controlled–Growth within Block Copolymer Templates

AU - Azoulay, Rotem

AU - Shomrat, Neta

AU - Weisbord, Inbal

AU - Atiya, Galit

AU - Segal-Peretz, Tamar

PY - 2019/12/1

Y1 - 2019/12/1

N2 - Nanofabrication is continuously searching for new methodologies to fabricate 3D nanostructures with 3D control over their chemical composition. A new approach for heterostructure nanorod array fabrication through spatially controlled–growth of multiple metal oxides within block copolymer (BCP) templates is presented. Selective growth of metal oxides within the cylindrical polymer domains of polystyrene-block-poly methyl methacrylate is performed using sequential infiltration synthesis (SIS). Tuning the diffusion of trimethyl aluminum and diethyl zinc organometallic precursors in the BCP film directs the growth of AlOx and ZnO to different locations within the cylindrical BCP domains, in a single SIS process. BCP removal yields an AlOx-ZnO heterostructure nanorods array, as corroborated by 3D characterization with scanning transmission electron microscopy (STEM) tomography and a combination of STEM and energy-dispersive X-ray spectroscopy tomography. The strategy presented here will open up new routes for complex 3D nanostructure fabrication.

AB - Nanofabrication is continuously searching for new methodologies to fabricate 3D nanostructures with 3D control over their chemical composition. A new approach for heterostructure nanorod array fabrication through spatially controlled–growth of multiple metal oxides within block copolymer (BCP) templates is presented. Selective growth of metal oxides within the cylindrical polymer domains of polystyrene-block-poly methyl methacrylate is performed using sequential infiltration synthesis (SIS). Tuning the diffusion of trimethyl aluminum and diethyl zinc organometallic precursors in the BCP film directs the growth of AlOx and ZnO to different locations within the cylindrical BCP domains, in a single SIS process. BCP removal yields an AlOx-ZnO heterostructure nanorods array, as corroborated by 3D characterization with scanning transmission electron microscopy (STEM) tomography and a combination of STEM and energy-dispersive X-ray spectroscopy tomography. The strategy presented here will open up new routes for complex 3D nanostructure fabrication.

KW - block copolymers

KW - heterostructures

KW - nanofabrication

KW - sequential infiltration synthesis

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DO - https://doi.org/10.1002/smll.201904657

M3 - مقالة

SN - 1613-6810

VL - 15

JO - Small

JF - Small

IS - 51

M1 - 1904657

ER -

Metal Oxide Heterostructure Array via Spatially Controlled–Growth within Block Copolymer Templates

Abstract

Keywords

All Science Journal Classification (ASJC) codes

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