Meso scale MEMS inertial switch fabricated using an electroplated metal-on-insulator process

Y. Gerson, D. Schreiber, H. Grau, S. Krylov

Research output: Contribution to journalArticlepeer-review


In this work, we report on a novel simple yet robust two-mask metal-on-insulator (MOI) process and illustrate its implementation for the fabrication of a meso scale MEMS inertial switch. The devices were fabricated of a ∼40 m thick layer of nickel electrodeposited on top of a 4 m thick thermal field oxide (TOX) covering a single crystal silicon wafer. A 40 m thick layer of KMPR® resist was used as a mold and allowed the formation of high-aspect-ratio (1:5) metal structures. The devices were released by the sacrificial etching of the TOX layer in hydrofluoric acid. The fabricated devices were mounted in a ceramic enclosure and were characterized using both an electromagnet shaker and a drop tester. The functionality of the switch, aimed to trigger an electrical circuit when subjected to an acceleration pulse with amplitude of 300 g and duration of 200 s, was demonstrated experimentally and the performance targets were achieved. The experimental results were consistent with the model predictions obtained through finite element simulations.

Original languageEnglish
Article number025008
JournalJournal of Micromechanics and Microengineering
Issue number2
StatePublished - Feb 2014


  • electroplated nickel
  • inertial switch
  • meso scale MEMS
  • metal on insulator

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Mechanics of Materials
  • Mechanical Engineering
  • Electrical and Electronic Engineering


Dive into the research topics of 'Meso scale MEMS inertial switch fabricated using an electroplated metal-on-insulator process'. Together they form a unique fingerprint.

Cite this