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Membrane-integrated superconducting nanowire singlephoton detectors

  • F. Najafi
  • , J. Mower
  • , X. Hu
  • , F. Bellei
  • , P. Kharel
  • , A. Dane
  • , Y. Ivry
  • , L. Cheong
  • , K. Sunter
  • , D. Englund
  • , K. K. Berggren

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.

Original languageEnglish GB
Title of host publication2013 Conference on Lasers and Electro-Optics, CLEO 2013
Subtitle of host publicationQELS_Fundamental Science, CLEO:QELS FS 2013
PagesQF1A.6
StatePublished - 2013
Externally publishedYes
Event2013 Conference on Lasers and Electro-Optics, CLEO 2013 - San Jose, CA, United States
Duration: 9 Jun 201314 Jun 2013

Publication series

Name2013 Conference on Lasers and Electro-Optics, CLEO 2013

Conference

Conference2013 Conference on Lasers and Electro-Optics, CLEO 2013
Country/TerritoryUnited States
CitySan Jose, CA
Period9/06/1314/06/13

ASJC Scopus subject areas

  • Electronic, Optical and Magnetic Materials

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