Membrane-integrated superconducting nanowire singlephoton detectors

F. Najafi, J. Mower, X. Hu, F. Bellei, P. Kharel, A. Dane, Y. Ivry, L. Cheong, K. Sunter, D. Englund, K. K. Berggren

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.

Original languageEnglish
Title of host publication2013 Conference on Lasers and Electro-Optics, CLEO 2013
Subtitle of host publicationQELS_Fundamental Science, CLEO:QELS FS 2013
PagesQF1A.6
DOIs
StatePublished - 2013
Externally publishedYes
Event2013 Conference on Lasers and Electro-Optics, CLEO 2013 - San Jose, CA, United States
Duration: 9 Jun 201314 Jun 2013

Publication series

Name2013 Conference on Lasers and Electro-Optics, CLEO 2013

Conference

Conference2013 Conference on Lasers and Electro-Optics, CLEO 2013
Country/TerritoryUnited States
CitySan Jose, CA
Period9/06/1314/06/13

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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