@inproceedings{0dc4a36542964725a762be11ba1f6e98,
title = "Membrane-integrated superconducting nanowire singlephoton detectors",
abstract = "We integrated superconducting nanowire single-photon detectors on sub-400-nm-thick silicon nitride membranes, which can then be transferred and aligned to photonic structures on a secondary chip with sub-micron placement accuracy.",
author = "F. Najafi and J. Mower and X. Hu and F. Bellei and P. Kharel and A. Dane and Y. Ivry and L. Cheong and K. Sunter and D. Englund and Berggren, {K. K.}",
year = "2013",
doi = "https://doi.org/10.1364/cleo_qels.2013.qf1a.6",
language = "الإنجليزيّة",
isbn = "9781557529725",
series = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
pages = "QF1A.6",
booktitle = "2013 Conference on Lasers and Electro-Optics, CLEO 2013",
note = "2013 Conference on Lasers and Electro-Optics, CLEO 2013 ; Conference date: 09-06-2013 Through 14-06-2013",
}