Measures of quality-factor in gap-closing electrostatic resonators

S. Shmulevich; M. Lerman; D. Elata

doi:https://doi.org/10.1109/MEMSYS.2013.6474267

Measures of quality-factor in gap-closing electrostatic resonators

S. Shmulevich, M. Lerman, D. Elata

Mechanical Engineering

Technion - Israel Institute of Technology

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

We present analytic expressions and experimental verification for common measures of quality-factor in gap-closing electrostatic resonators. We show that peak-gain, peak-sharpness and logarithmic decrement are distinctively different and are not equal to the quality-factor of the system. The significance of this work is that it clarifies the correct way in which the performance of MEMS resonators should be reported to avoid ambiguity.

Original language	English
Title of host publication	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Pages	417-420
Number of pages	4
DOIs	https://doi.org/10.1109/MEMSYS.2013.6474267
State	Published - 2013
Event	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 - Taipei, Taiwan, Province of China Duration: 20 Jan 2013 → 24 Jan 2013

Publication series

Name	Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Conference

Conference	IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013
Country/Territory	Taiwan, Province of China
City	Taipei
Period	20/01/13 → 24/01/13

All Science Journal Classification (ASJC) codes

Electronic, Optical and Magnetic Materials
Condensed Matter Physics
Mechanical Engineering
Electrical and Electronic Engineering

Access to Document

https://doi.org/10.1109/MEMSYS.2013.6474267

Cite this

Shmulevich, S., Lerman, M., & Elata, D. (2013). Measures of quality-factor in gap-closing electrostatic resonators. In IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 (pp. 417-420). Article 6474267 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)). https://doi.org/10.1109/MEMSYS.2013.6474267

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title = "Measures of quality-factor in gap-closing electrostatic resonators",

abstract = "We present analytic expressions and experimental verification for common measures of quality-factor in gap-closing electrostatic resonators. We show that peak-gain, peak-sharpness and logarithmic decrement are distinctively different and are not equal to the quality-factor of the system. The significance of this work is that it clarifies the correct way in which the performance of MEMS resonators should be reported to avoid ambiguity.",

author = "S. Shmulevich and M. Lerman and D. Elata",

year = "2013",

doi = "https://doi.org/10.1109/MEMSYS.2013.6474267",

language = "الإنجليزيّة",

isbn = "9781467356558",

series = "Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)",

pages = "417--420",

booktitle = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013",

note = "IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013 ; Conference date: 20-01-2013 Through 24-01-2013",

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Shmulevich, S, Lerman, M & Elata, D 2013, Measures of quality-factor in gap-closing electrostatic resonators. in IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013., 6474267, Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS), pp. 417-420, IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013, Taipei, Taiwan, Province of China, 20/01/13. https://doi.org/10.1109/MEMSYS.2013.6474267

Measures of quality-factor in gap-closing electrostatic resonators. / Shmulevich, S.; Lerman, M.; Elata, D.
IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013. 2013. p. 417-420 6474267 (Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Measures of quality-factor in gap-closing electrostatic resonators

AU - Shmulevich, S.

AU - Lerman, M.

AU - Elata, D.

PY - 2013

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N2 - We present analytic expressions and experimental verification for common measures of quality-factor in gap-closing electrostatic resonators. We show that peak-gain, peak-sharpness and logarithmic decrement are distinctively different and are not equal to the quality-factor of the system. The significance of this work is that it clarifies the correct way in which the performance of MEMS resonators should be reported to avoid ambiguity.

AB - We present analytic expressions and experimental verification for common measures of quality-factor in gap-closing electrostatic resonators. We show that peak-gain, peak-sharpness and logarithmic decrement are distinctively different and are not equal to the quality-factor of the system. The significance of this work is that it clarifies the correct way in which the performance of MEMS resonators should be reported to avoid ambiguity.

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DO - https://doi.org/10.1109/MEMSYS.2013.6474267

M3 - منشور من مؤتمر

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T3 - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

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BT - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

T2 - IEEE 26th International Conference on Micro Electro Mechanical Systems, MEMS 2013

Y2 - 20 January 2013 through 24 January 2013

ER -

Measures of quality-factor in gap-closing electrostatic resonators

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Conference

All Science Journal Classification (ASJC) codes

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