Laser vibrometer interferometry for speckle patterns tracking systems

Ariel Schwarz, Amir Shemer, Nisan Ozana, Javier García, Zeev Zalevsky

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

In this paper we propose a modulated laser system combining a speckle pattern tracking method for surface tilting changes sensing with an interferometer for surface z-axis changes sensing at the same scan time.

Original languageEnglish
Title of host publication2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
PublisherInstitute of Electrical and Electronics Engineers Inc.
Pages1-2
Number of pages2
ISBN (Electronic)9781943580279
DOIs
StatePublished - 25 Oct 2017
Event2017 Conference on Lasers and Electro-Optics, CLEO 2017 - San Jose, United States
Duration: 14 May 201719 May 2017

Publication series

Name2017 Conference on Lasers and Electro-Optics, CLEO 2017 - Proceedings
Volume2017-January

Conference

Conference2017 Conference on Lasers and Electro-Optics, CLEO 2017
Country/TerritoryUnited States
CitySan Jose
Period14/05/1719/05/17

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Instrumentation
  • Atomic and Molecular Physics, and Optics

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