@inproceedings{e00ade36bff340f9851109bc561f81c0,
title = "Laser Induced Chemical Etching of Quartz for MEMS sensors fabrication",
abstract = "We report on a novel Laser-Induced Chemical Etching technology for fabrication of functional crystalline quartz MEMS resonant sensors. The suggested lithography-free fabrication approach does not alter the crystalline structure of quartz and allows piezoelectric actuation and high geometric design flexibility. The resonant force sensitive device, incorporating compliant amplification mechanism, was fabricated by the reported method and its functionality has been demonstrated.",
keywords = "Crystalline quartz MEMS, force amplification, laser assistant etch, quartz anisotropic etch",
author = "M. Sirota and B. Lipavsky and D. Nuttman and N. Melech and O. Halevy and S. Krylov",
note = "Publisher Copyright: {\textcopyright} 2023 IEEE.; 10th IEEE International Symposium on Inertial Sensors and Systems, INERTIAL 2023 ; Conference date: 28-03-2023 Through 31-03-2023",
year = "2023",
doi = "10.1109/INERTIAL56358.2023.10103805",
language = "الإنجليزيّة",
isbn = "978-1-6654-5148-2",
series = "INERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",
publisher = "Institute of Electrical and Electronics Engineers Inc.",
booktitle = "INERTIAL 2023 - 10th IEEE International Symposium on Inertial Sensors and Systems, Proceedings",
address = "الولايات المتّحدة",
}