Kinetic model of co-deposition of thin multicomponent films

L. Klinger; D. V. Shtansky; E. A. Levashov; E. Rabkin

doi:10.1016/j.matlet.2015.05.013

Kinetic model of co-deposition of thin multicomponent films

L. Klinger, D. V. Shtansky, E. A. Levashov, E. Rabkin

Materials Science & Engineering

Technion - Israel Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

We considered a co-deposition of a thin film of refractory matrix phase and mobile immiscible component. We established a relationship between the concentration of mobile component incorporated in the composite film and surface diffusion coefficient of this component. The developed model was employed for the analysis of the experimental data on deposition of Ag-doped TiCaPCON films by co-sputtering of composite TiC_0.5-Ti₃PO_x-CaO and elemental Ag targets. We demonstrated that increasing the temperature during deposition process and analyzing the post-deposition distributing of the components across the film depth allows estimating the Arrhenius diffusion parameters of the mobile component (Ag). The diffusion coefficient of Ag on the surface of composite film was estimated: (0.1 m²/s)×exp(-155±10 kJ/mol).

Original language	English
Pages (from-to)	118-120
Number of pages	3
Journal	Materials Letters
Volume	156
DOIs	https://doi.org/10.1016/j.matlet.2015.05.013
State	Published - 1 Oct 2015

Keywords

Deposition
Diffusion
Thin films

All Science Journal Classification (ASJC) codes

Condensed Matter Physics
Mechanics of Materials
Mechanical Engineering
General Materials Science

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10.1016/j.matlet.2015.05.013

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@article{102d9553d4ad414abf7ae3a1c008b2e1,

title = "Kinetic model of co-deposition of thin multicomponent films",

abstract = "We considered a co-deposition of a thin film of refractory matrix phase and mobile immiscible component. We established a relationship between the concentration of mobile component incorporated in the composite film and surface diffusion coefficient of this component. The developed model was employed for the analysis of the experimental data on deposition of Ag-doped TiCaPCON films by co-sputtering of composite TiC0.5-Ti3POx-CaO and elemental Ag targets. We demonstrated that increasing the temperature during deposition process and analyzing the post-deposition distributing of the components across the film depth allows estimating the Arrhenius diffusion parameters of the mobile component (Ag). The diffusion coefficient of Ag on the surface of composite film was estimated: (0.1 m2/s)×exp(-155±10 kJ/mol).",

keywords = "Deposition, Diffusion, Thin films",

author = "L. Klinger and Shtansky, {D. V.} and Levashov, {E. A.} and E. Rabkin",

year = "2015",

month = oct,

day = "1",

doi = "10.1016/j.matlet.2015.05.013",

language = "الإنجليزيّة",

volume = "156",

pages = "118--120",

journal = "Materials Letters",

issn = "0167-577X",

publisher = "Elsevier B.V.",

}

TY - JOUR

T1 - Kinetic model of co-deposition of thin multicomponent films

AU - Klinger, L.

AU - Shtansky, D. V.

AU - Levashov, E. A.

AU - Rabkin, E.

PY - 2015/10/1

Y1 - 2015/10/1

N2 - We considered a co-deposition of a thin film of refractory matrix phase and mobile immiscible component. We established a relationship between the concentration of mobile component incorporated in the composite film and surface diffusion coefficient of this component. The developed model was employed for the analysis of the experimental data on deposition of Ag-doped TiCaPCON films by co-sputtering of composite TiC0.5-Ti3POx-CaO and elemental Ag targets. We demonstrated that increasing the temperature during deposition process and analyzing the post-deposition distributing of the components across the film depth allows estimating the Arrhenius diffusion parameters of the mobile component (Ag). The diffusion coefficient of Ag on the surface of composite film was estimated: (0.1 m2/s)×exp(-155±10 kJ/mol).

AB - We considered a co-deposition of a thin film of refractory matrix phase and mobile immiscible component. We established a relationship between the concentration of mobile component incorporated in the composite film and surface diffusion coefficient of this component. The developed model was employed for the analysis of the experimental data on deposition of Ag-doped TiCaPCON films by co-sputtering of composite TiC0.5-Ti3POx-CaO and elemental Ag targets. We demonstrated that increasing the temperature during deposition process and analyzing the post-deposition distributing of the components across the film depth allows estimating the Arrhenius diffusion parameters of the mobile component (Ag). The diffusion coefficient of Ag on the surface of composite film was estimated: (0.1 m2/s)×exp(-155±10 kJ/mol).

KW - Deposition

KW - Diffusion

KW - Thin films

UR - http://www.scopus.com/inward/record.url?scp=84929626625&partnerID=8YFLogxK

U2 - 10.1016/j.matlet.2015.05.013

DO - 10.1016/j.matlet.2015.05.013

M3 - مقالة

SN - 0167-577X

VL - 156

SP - 118

EP - 120

JO - Materials Letters

JF - Materials Letters

ER -

Kinetic model of co-deposition of thin multicomponent films

Abstract

Keywords

All Science Journal Classification (ASJC) codes

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