Integrating 2D electron gas oxide heterostructures on silicon using rare-earth titanates

Integrating oxide heterostructures on silicon has the potential to leverage the multifunctionalities of oxide systems into semiconductor device technology. We present the growth and characterization oftwo-dimensional electron gas (2DEG) oxide systems LaTi03/SrTi03 (LTO/STO) and GdTiO3/SrTiO3 (GTO/STO) on Si(001). We show interface- based conductivity in the oxide films and measure high electron densities ranging from ~9 x 1013 cm-2 interface-1 in GTO/STO/Si to ~9 x 1014 cm-2 interface -1 in LTO/STO/Si. We attribute the higher measured carrier density in the LTO/STO films to a higher concentration of interface- bound oxygen vacancies arising from a lower oxygen partial pressure during growth. These vacancies donate conduction electrons and result in an increased measured carrier density. The integration of such 2DEG oxide systems with silicon provides a bridge between the diverse electronic properties of oxide systems and the established semiconductor platform and points toward new devices and functionalities.