Integrated Polypyrrole Flexible Conductors for Biochips and MEMS Applications

Integrated polypyrrole, a conductive polymer, interconnects on polymeric substrates were microfabricated for flexible sensors
and actuators applications. It allows manufacturing of moving polymeric microcomponents suitable, for example, for microoptical-electromechanical (MOEMS) systems or implanted sensors. This generic technology allows producing “all polymer”
components where the polymers serve as both the structural and the actuating materials. In this paper we present two possible
novel architectures that integrate polypyrrole conductors with other structural polymers: (a) polypyrrole embedded into flexible
polydimethylsiloxane (PDMS) matrix forming high aspect ratio electrodes and (b) polypyrrole deposited on planar structures.
Self-aligned polypyrrole electropolymerization was developed and demonstrated for conducting polymer lines on either gold or
copper seed layers. The electropolymerization process, using cyclic voltammetry from an electrolyte containing the monomer, is
described, as well as the devices’ characteristics. Finally, we discuss the effect of integrating conducting polymers with metal seed
layer, thus enhancing the device durability and reliability.