In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves

Tomáš Grabec; Petr Sedlák; Pavla Stoklasová; Martina Thomasová; Doron Shilo; Meni Kabla; Hanus Seiner; Michal Landa

doi:10.1088/0964-1726/25/12/127002

In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves

Tomáš Grabec
, Petr Sedlák
, Pavla Stoklasová
, Martina Thomasová
, Doron Shilo
, Meni Kabla
, Hanus Seiner
, Michal Landa

Mechanical Engineering

Technion - Israel Institute of Technology

Research output: Contribution to journal › Article › peer-review

Abstract

The impulse stimulated thermal scattering experimental technique is used for contactless in situ detection of phase transitions in thin nickel-titanium films deposited on silicon substrates. It is shown that this technique enables the determination of the local properties of the film over a fully coated wafer, in particular the thickness of the film and the temperature dependence of the Young's modulus, and can thus be used for monitoring of the spatial distribution of the functional properties in films prepared by a combinatorial sputtering approach.

Original language	English
Article number	127002
Journal	Smart Materials and Structures
Volume	25
Issue number	12
DOIs	https://doi.org/10.1088/0964-1726/25/12/127002
State	Published - 15 Nov 2016

Keywords

in situ characterization
shape memory alloys
surface acoustic waves
thin films

ASJC Scopus subject areas

Signal Processing
Civil and Structural Engineering
Atomic and Molecular Physics, and Optics
General Materials Science
Condensed Matter Physics
Mechanics of Materials
Electrical and Electronic Engineering

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10.1088/0964-1726/25/12/127002

Cite this

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title = "In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves",

abstract = "The impulse stimulated thermal scattering experimental technique is used for contactless in situ detection of phase transitions in thin nickel-titanium films deposited on silicon substrates. It is shown that this technique enables the determination of the local properties of the film over a fully coated wafer, in particular the thickness of the film and the temperature dependence of the Young's modulus, and can thus be used for monitoring of the spatial distribution of the functional properties in films prepared by a combinatorial sputtering approach.",

keywords = "in situ characterization, shape memory alloys, surface acoustic waves, thin films",

author = "Tom{\'a}{\v s} Grabec and Petr Sedl{\'a}k and Pavla Stoklasov{\'a} and Martina Thomasov{\'a} and Doron Shilo and Meni Kabla and Hanus Seiner and Michal Landa",

note = "Publisher Copyright: {\textcopyright} 2016 IOP Publishing Ltd.",

year = "2016",

month = nov,

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doi = "10.1088/0964-1726/25/12/127002",

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TY - JOUR

T1 - In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves

AU - Grabec, Tomáš

AU - Sedlák, Petr

AU - Stoklasová, Pavla

AU - Thomasová, Martina

AU - Shilo, Doron

AU - Kabla, Meni

AU - Seiner, Hanus

AU - Landa, Michal

PY - 2016/11/15

Y1 - 2016/11/15

N2 - The impulse stimulated thermal scattering experimental technique is used for contactless in situ detection of phase transitions in thin nickel-titanium films deposited on silicon substrates. It is shown that this technique enables the determination of the local properties of the film over a fully coated wafer, in particular the thickness of the film and the temperature dependence of the Young's modulus, and can thus be used for monitoring of the spatial distribution of the functional properties in films prepared by a combinatorial sputtering approach.

AB - The impulse stimulated thermal scattering experimental technique is used for contactless in situ detection of phase transitions in thin nickel-titanium films deposited on silicon substrates. It is shown that this technique enables the determination of the local properties of the film over a fully coated wafer, in particular the thickness of the film and the temperature dependence of the Young's modulus, and can thus be used for monitoring of the spatial distribution of the functional properties in films prepared by a combinatorial sputtering approach.

KW - in situ characterization

KW - shape memory alloys

KW - surface acoustic waves

KW - thin films

UR - https://www.scopus.com/pages/publications/84995608141

U2 - 10.1088/0964-1726/25/12/127002

DO - 10.1088/0964-1726/25/12/127002

M3 - مقالة

SN - 0964-1726

VL - 25

JO - Smart Materials and Structures

JF - Smart Materials and Structures

IS - 12

M1 - 127002

ER -

In situ characterization of local elastic properties of thin shape memory films by surface acoustic waves

Abstract

Keywords

ASJC Scopus subject areas

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