Abstract
Silicon photonics represents an attractive platform for optical sensing of ultrasound owing to the high light confinement it can achieved, which can enable the development of detector with sub-micron sizes. However, the small elasto-optic coefficients of silicon and silica limit the sensitivity of conventional silicon-on-insulator (SOI) sensors, in which the silicon core is surrounded by a silica cladding. In this work, we demonstrate an order-of-magnitude increase in the response of a silicon-photonics waveguide to ultrasound by replacing the silica over-cladding with bisbenzocyclobutene (BCB) - a transparent polymer with a high elasto-optic coefficient.
Original language | American English |
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Title of host publication | Photons Plus Ultrasound: Imaging and Sensing 2020 |
Editors | Alexander A. Oraevsky, Lihong V. Wang |
Pages | 112400X |
Volume | 11240 |
DOIs | |
State | Published - 2020 |
Event | SPIE Photonics West 2020 - San Francisco, United States Duration: 2 Feb 2020 → 5 Feb 2020 https://www.spiedigitallibrary.org/conference-proceedings-of-spie/11240.toc#FrontMatterVolume11240 |
Conference
Conference | SPIE Photonics West 2020 |
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Country/Territory | United States |
City | San Francisco |
Period | 2/02/20 → 5/02/20 |
Internet address |
Keywords
- Silicon photonics
- interferometry
- ultrasound