Hybrid, Model-Based Tapping Atomic Force Microscope

Izhak Bucher, Eyal Baruch

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

Abstract

A new method for analyzing tapping mode atomic force microscopy (AFM) is described. This method uses an automatic resonance-tracking control scheme and a hybrid model to improve the accuracy and speed of topography reconstruction by considering the interactions between the AFM tip and the measured sample. A simplified model captures the complex dynamical behavior and eliminates the need to lock onto the reference distance at every measurement point. The accuracy of this method was verified through numerical simulation of Van der Waals and capillary interaction forces, as well as experimental measurements of a coin's topography.

Original languageEnglish
Title of host publicationMicroactuators, Microsensors and Micromechanisms - MAMM 2024
EditorsDuc-Nam Nguyen, Ngoc Dang Khoa Tran, Van Tuan Huynh, Takahito Ono, Van Hieu Nguyen, Ashok Kumar Pandey
Pages174-181
Number of pages8
DOIs
StatePublished - 2025
Event7th Conference on Microactuators, Microsensors and Micromechanisms, MAMM 2024 - Ho Chi Minh City, Viet Nam
Duration: 9 Nov 202411 Nov 2024

Publication series

NameMechanisms and Machine Science
Volume177

Conference

Conference7th Conference on Microactuators, Microsensors and Micromechanisms, MAMM 2024
Country/TerritoryViet Nam
CityHo Chi Minh City
Period9/11/2411/11/24

Keywords

  • Atomic force microscope
  • hybrid dynamic
  • topology reconstruction
  • vibrating sensor

All Science Journal Classification (ASJC) codes

  • Mechanics of Materials
  • Mechanical Engineering

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